Semiconductor device

ABSTRACT

An object is to provide a semiconductor device with a novel structure. The semiconductor device includes a first wiring; a second wiring; a third wiring; a fourth wiring; a first transistor having a first gate electrode, a first source electrode, and a first drain electrode; and a second transistor having a second gate electrode, a second source electrode, and a second drain electrode. The first transistor is provided in a substrate including a semiconductor material. The second transistor includes an oxide semiconductor layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.15/615,873, filed Jun. 7, 2017, now allowed, which is a continuation ofU.S. application Ser. No. 15/175,190, filed Jun. 7, 2016, now U.S. Pat.No. 9,685,447, which is a continuation of U.S. application Ser. No.14/804,478, filed Jul. 21, 2015, now U.S. Pat. No. 9,373,640, which is acontinuation of U.S. application Ser. No. 14/336,107, filed Jul. 21,2014, now U.S. Pat. No. 9,105,511, which is a divisional of U.S.application Ser. No. 12/914,672, filed Oct. 28, 2010, now U.S. Pat. No.8,896,042, which claims the benefit of a foreign priority applicationfiled in Japan as Serial No. 2009-251261 on Oct. 30, 2009, all of whichare incorporated by reference.

TECHNICAL FIELD

The invention disclosed herein relates to a semiconductor device using asemiconductor element and a method for manufacturing the semiconductordevice.

BACKGROUND ART

Storage devices using semiconductor elements are broadly classified intotwo categories: a volatile device that loses stored data when powersupply stops, and a non-volatile device that retains stored data evenwhen power is not supplied.

A typical example of a volatile storage device is a DRAM (dynamic randomaccess memory). A DRAM stores data in such a manner that a transistorincluded in a storage element is selected and electric charge is storedin a capacitor.

When data is read from a DRAM, electric charge in a capacitor is lost onthe above-described principle; thus, another writing operation isnecessary every time data is read out. Moreover, a transistor includedin a storage element has a leakage current and electric charge flowsinto or out of a capacitor even when the transistor is not selected, sothat the data holding time is short. For that reason, another writingoperation (refresh operation) is necessary at predetermined intervals,and it is difficult to sufficiently reduce power consumption.Furthermore, since stored data is lost when power supply stops, anadditional storage device using a magnetic material or an opticalmaterial is needed in order to hold the data for a long time.

Another example of a volatile storage device is an SRAM (static randomaccess memory). An SRAM retains stored data by using a circuit such as aflip-flop and thus does not need refresh operation. This means that anSRAM has an advantage over a DRAM. However, cost per storage capacity isincreased because a circuit such as a flip-flop is used. Moreover, as ina DRAM, stored data in an SRAM is lost when power supply stops.

A typical example of a non-volatile storage device is a flash memory. Aflash memory includes a floating gate between a gate electrode and achannel formation region in a transistor and stores data by holdingelectric charge in the floating gate. Therefore, a flash memory hasadvantages in that the data holding time is extremely long (almostpermanent) and refresh operation which is necessary in a volatilestorage device is not needed (e.g., see Patent Document 1).

However, a gate insulating layer included in a storage elementdeteriorates by tunneling current generated in writing, so that thestorage element stops its function after a predetermined number ofwriting operations. In order to reduce adverse effects of this problem,a method in which the numbers of writing operations for storage elementsare equalized is employed, for example. However, a complicatedperipheral circuit is needed to realize this method. Moreover, employingsuch a method does not solve the fundamental problem of lifetime. Inother words, a flash memory is not suitable for applications in whichdata is frequently rewritten.

In addition, high voltage is necessary for holding electric charge inthe floating gate or removing the electric charge. Further, it takes arelatively long time to hold or remove electric charge, and it is noteasy to perform writing and erasing at higher speed.

REFERENCE

Patent Document 1: Japanese Published Patent Application No. S57-105889

DISCLOSURE OF INVENTION

In view of the foregoing problems, an object of one embodiment of theinvention disclosed herein is to provide a semiconductor device with anovel structure in which stored data can be retained even when power isnot supplied, and there is no limitation on the number of writing.

One embodiment of the present invention is a semiconductor device havinga layered structure of a transistor formed using an oxide semiconductorand a transistor formed using a material other than the oxidesemiconductor. The following structures can be employed, for example.

According to one embodiment of the present invention, a semiconductordevice includes a first wiring, a second wiring, a third wiring, afourth wiring, a fifth wiring, and a plurality of storage elementsconnected in parallel between the first wiring and the second wiring.One of the plurality of storage elements includes a first transistorhaving a first gate electrode, a first source electrode, and a firstdrain electrode; a second transistor having a second gate electrode, asecond source electrode, and a second drain electrode; and a thirdtransistor having a third gate electrode, a third source electrode, anda third drain electrode. The first transistor is provided in a substrateincluding a semiconductor material. The second transistor includes anoxide semiconductor layer. The first gate electrode and one of thesecond source electrode and the second drain electrode are electricallyconnected to each other. The first wiring and the first source electrodeare electrically connected to each other. The first drain electrode andthe third source electrode are electrically connected to each other. Thesecond wiring and the third drain electrode are electrically connectedto each other. The third wiring and the other of the second sourceelectrode and the second drain electrode are electrically connected toeach other. The fourth wiring and the second gate electrode areelectrically connected to each other. The fifth wiring and the thirdgate electrode are electrically connected to each other.

According to one embodiment of the present invention, a semiconductordevice includes a first wiring, a second wiring, a third wiring, afourth wiring, a fifth wiring, and a plurality of storage elementsconnected in parallel between the first wiring and the second wiring.One of the plurality of storage elements includes a first transistorhaving a first gate electrode, a first source electrode, and a firstdrain electrode; a second transistor having a second gate electrode, asecond source electrode, and a second drain electrode; and a capacitor.The first transistor is provided in a substrate including asemiconductor material. The second transistor includes an oxidesemiconductor layer. The first gate electrode, one of the second sourceelectrode and the second drain electrode, and one of electrodes of thecapacitor are electrically connected to each other. The first wiring andthe first source electrode are electrically connected to each other. Thesecond wiring and the first drain electrode are electrically connectedto each other. The third wiring and the other of the second sourceelectrode and the second drain electrode are electrically connected toeach other. The fourth wiring and the second gate electrode areelectrically connected to each other. The fifth wiring and the other ofthe electrodes of the capacitor are electrically connected to eachother.

In any of the above structures, the first transistor may include achannel formation region provided in the substrate including thesemiconductor material, impurity regions provided so as to sandwich thechannel formation region, a first gate insulating layer over the channelformation region, the first gate electrode over the first gateinsulating layer, and the first source electrode and the first drainelectrode electrically connected to the impurity regions.

In any of the above structures, the second transistor may include thesecond gate electrode over the substrate including the semiconductormaterial, a second gate insulating layer over the second gate electrode,the oxide semiconductor layer over the second gate insulating layer, andthe second source electrode and the second drain electrode electricallyconnected to the oxide semiconductor layer.

In any of the above structures, the third transistor may include achannel formation region provided in the substrate including thesemiconductor material, impurity regions provided so as to sandwich thechannel formation region, a third gate insulating layer over the channelformation region, the third gate electrode over the third gateinsulating layer, and the third source electrode and the third drainelectrode electrically connected to the impurity regions.

In any of the above structures, a single crystal semiconductor substrateor an SOI substrate is preferably used as the substrate including thesemiconductor material. In particular, silicon is preferably used as thesemiconductor material.

In any of the above structures, the oxide semiconductor layer ispreferably formed using an In—Ga—Zn—O-based oxide semiconductormaterial. More preferably, the oxide semiconductor layer includes acrystal of In₂Ga₂ZnO₇. Moreover, the concentration of hydrogen in theoxide semiconductor layer is preferably 5×10¹⁹/cm³ or less. Theoff-state current of the second transistor is preferably 1×10⁻¹³ A orless.

In any of the above structures, the second transistor can be provided ina region overlapping with the first transistor.

Note that in this specification and the like, the term such as “over” or“below” does not necessarily mean that a component is placed “directlyon” or “directly under” another component. For example, the expression“a first gate electrode over a gate insulating layer” does not excludethe case where a component is placed between the gate insulating layerand the gate electrode. Moreover, the terms such as “over” and “below”are only used for convenience of description and can include the casewhere the relation of components is reversed, unless otherwisespecified.

In addition, in this specification and the like, the term such as“electrode” or “wiring” does not limit a function of a component. Forexample, an “electrode” is sometimes used as part of a “wiring”, andvice versa. Furthermore, the term “electrode” or “wiring” can includethe case where a plurality of “electrodes” or “wirings” are formed in anintegrated manner.

Functions of a “source” and a “drain” are sometimes replaced with eachother when a transistor of opposite polarity is used or when thedirection of current flowing is changed in circuit operation, forexample. Therefore, the terms “source” and “drain” can be replaced witheach other in this specification and the like.

Note that in this specification and the like, the term “electricallyconnected” includes the case where components are connected through anobject having any electric function. There is no particular limitationon an object having any electric function as long as electric signalscan be transmitted and received between components that are connectedthrough the object.

Examples of an object having any electric function are a switchingelement such as a transistor, a resistor, an inductor, a capacitor, andan element with a variety of functions as well as an electrode and awiring.

In general, the term “SOI substrate” means a substrate where a siliconsemiconductor layer is provided on an insulating surface. In thisspecification and the like, the term “SOI substrate” also includes asubstrate where a semiconductor layer formed using a material other thansilicon is provided over an insulating surface in its category. That is,a semiconductor layer included in the “SOI substrate” is not limited toa silicon semiconductor layer. A substrate in the “SOI substrate” is notlimited to a semiconductor substrate such as a silicon wafer and can bea non-semiconductor substrate such as a glass substrate, a quartzsubstrate, a sapphire substrate, or a metal substrate. In other words,the “SOI substrate” also includes a conductive substrate or aninsulating substrate provided with a layer formed of a semiconductormaterial in its category. In addition, in this specification and thelike, the term “semiconductor substrate” means not only a substrateformed using only a semiconductor material but also all substratesincluding a semiconductor material. That is, in this specification andthe like, the “SOI substrate” is also included in the category of the“semiconductor substrate”.

One embodiment of the present invention provides a semiconductor devicein which a transistor including a material other than an oxidesemiconductor is placed in a lower portion and a transistor including anoxide semiconductor is placed in an upper portion.

Since the off-state current of a transistor including an oxidesemiconductor is extremely low, stored data can be retained for anextremely long time by using the transistor. In other words, powerconsumption can be adequately reduced because refresh operation becomesunnecessary or the frequency of refresh operation can be extremely low.Moreover, stored data can be retained for a long time even when power isnot supplied.

Further, high voltage is not needed to write data, and deterioration ofthe element does not become a problem. Furthermore, data is writtendepending on the on state and the off state of the transistor, wherebyhigh-speed operation can be easily realized. In addition, there is noneed of operation for erasing data.

Since a transistor including a material other than an oxidesemiconductor can operate at sufficiently high speed, stored data can beread out at high speed by using the transistor.

A semiconductor device with a novel feature can be realized by includingboth the transistor including a material other than an oxidesemiconductor and the transistor including an oxide semiconductor.

BRIEF DESCRIPTION OF DRAWINGS

In the accompanying drawings:

FIG. 1 is a circuit diagram of a semiconductor device;

FIGS. 2A and 2B are a cross-sectional view and a plan view forillustrating a semiconductor device;

FIGS. 3A to 3H are cross-sectional views illustrating steps formanufacturing a semiconductor device;

FIGS. 4A to 4G are cross-sectional views illustrating steps formanufacturing a semiconductor device;

FIGS. 5A to 5D are cross-sectional views illustrating steps formanufacturing a semiconductor device;

FIG. 6 is a cross-sectional view of a semiconductor device;

FIGS. 7A and 7B are cross-sectional views each illustrating asemiconductor device;

FIGS. 8A and 8B are cross-sectional views each illustrating asemiconductor device;

FIGS. 9A and 9B are cross-sectional views each illustrating asemiconductor device;

FIG. 10 is a circuit diagram of a storage element;

FIG. 11 is a timing chart for illustrating operation of a storageelement;

FIG. 12 is a circuit diagram of a semiconductor device;

FIG. 13 is a circuit diagram of a storage element;

FIG. 14 is a circuit diagram of a semiconductor device;

FIG. 15 is a circuit diagram of a storage element;

FIG. 16 illustrates a relation of potentials of a node A and a fifthwiring;

FIG. 17 is a circuit diagram of a semiconductor device;

FIG. 18 is a circuit diagram of a storage element;

FIG. 19 is a circuit diagram of a semiconductor device;

FIGS. 20A and 20B are circuit diagrams each illustrating a storageelement;

FIG. 21 is a circuit diagram of a storage element;

FIG. 22 is a circuit diagram of a reading circuit;

FIGS. 23A to 23F each illustrate an electronic device;

FIG. 24 is a cross-sectional view of an inverted staggered transistorincluding an oxide semiconductor;

FIGS. 25A and 25B are energy band diagrams (schematic diagrams) of across section A-A′ in FIG. 24;

FIG. 26A illustrates a state in which a positive potential (+V_(G)) isapplied to a gate (G1), and FIG. 26B illustrates a state in which anegative potential (−V_(G)) is applied to the gate (G1); and

FIG. 27 illustrates a relation between the vacuum level, the workfunction (φ_(M)) of a metal, and the electron affinity (χ) of an oxidesemiconductor.

BEST MODE FOR CARRYING OUT THE INVENTION

Examples of embodiments of the present invention will be described belowwith reference to the accompanying drawings. Note that the presentinvention is not limited to the following description, and it is easilyunderstood by those skilled in the art that modes and details disclosedherein can be modified in various ways without departing from the spiritand the scope of the present invention. Therefore, the present inventionis not to be construed as being limited to the content of theembodiments included herein.

Note that the position, the size, the range, or the like of eachstructure illustrated in drawings and the like is not accuratelyrepresented in some cases for easy understanding. Therefore, embodimentsof the present invention are not necessarily limited to such a position,size, range, or the like disclosed in the drawings and the like.

In this specification and the like, ordinal numbers such as “first”,“second”, and “third” are used in order to avoid confusion amongcomponents, and the terms do not mean limitation of the number ofcomponents.

Embodiment 1

In this embodiment, a structure and a manufacturing method of asemiconductor device according to one embodiment of the inventiondisclosed herein will be described with reference to FIG. 1, FIGS. 2Aand 2B, FIGS. 3A to 3H, FIGS. 4A to 4G, FIGS. 5A to 5D, FIG. 6, FIGS. 7Aand 7B, FIGS. 8A and 8B, and FIGS. 9A and 9B.

<Circuit Configuration of Semiconductor Device>

FIG. 1 illustrates an example of a circuit configuration of asemiconductor device. The semiconductor device includes a transistor 160formed using a material other than an oxide semiconductor, and atransistor 162 formed using an oxide semiconductor.

Here, a gate electrode of the transistor 160 is electrically connectedto one of a source electrode and a drain electrode of the transistor162. A first wiring (a 1st line, also referred to as a source line) iselectrically connected to a source electrode of the transistor 160. Asecond wiring (a 2nd line, also referred to as a bit line) iselectrically connected to a drain electrode of the transistor 160. Athird wiring (a 3rd line, also referred to as a first signal line) iselectrically connected to the other of the source electrode and thedrain electrode of the transistor 162. A fourth wiring (a 4th line, alsoreferred to as a second signal line) is electrically connected to a gateelectrode of the transistor 162.

Since the transistor 160 including a material other than an oxidesemiconductor can operate at sufficiently high speed, stored data can beread out at high speed by using the transistor 160. Moreover, thetransistor 162 including an oxide semiconductor has extremely lowoff-state current. For that reason, a potential of the gate electrode ofthe transistor 160 can be held for an extremely long time by turning offthe transistor 162.

Writing, holding, and reading of data can be performed in the followingmanner, using the advantage that the potential of the gate electrode canbe held.

Firstly, writing and holding of data will be described. First, apotential of the fourth wiring is set to a potential at which thetransistor 162 is turned on, and the transistor 162 is turned on. Thus,a potential of the third wiring is supplied to the gate electrode of thetransistor 160 (writing). After that, the potential of the fourth wiringis set to a potential at which the transistor 162 is turned off, and thetransistor 162 is turned off, whereby the potential of the gateelectrode of the transistor 160 is held (holding).

Since the off-state current of the transistor 162 is extremely low, thepotential of the gate electrode of the transistor 160 is held for a longtime. For example, when the potential of the gate electrode of thetransistor 160 is a potential at which the transistor 160 is turned on,the on state of the transistor 160 is kept for a long time. Moreover,when the potential of the gate electrode of the transistor 160 is apotential at which the transistor 160 is turned off, the off state ofthe transistor 160 is kept for a long time.

Secondly, reading of data will be described. When a predeterminedpotential (a low potential) is supplied to the first wiring in a statewhere the on state or the off state of the transistor 160 is kept asdescribed above, a potential of the second wiring varies depending onthe on state or the off state of the transistor 160. For example, whenthe transistor 160 is on, the potential of the second wiring becomeslower than the potential of the first wiring. In contrast, when thetransistor 160 is off, the potential of the second wiring is notchanged.

In such a manner, the potential of the second wiring and a predeterminedpotential are compared with each other in a state where data is held,whereby the data can be read out.

Thirdly, rewriting of data will be described. Rewriting of data isperformed in a manner similar to that of the writing and holding ofdata. That is, the potential of the fourth wiring is set to a potentialat which the transistor 162 is turned on, and the transistor 162 isturned on. Thus, a potential of the third wiring (a potential for newdata) is supplied to the gate electrode of the transistor 160. Afterthat, the potential of the fourth wiring is set to a potential at whichthe transistor 162 is turned off, and the transistor 162 is turned off,whereby the new data is stored.

In the semiconductor device according to the invention disclosed herein,data can be directly rewritten by another writing of data as describedabove. For that reason, erasing operation which is necessary for a flashmemory or the like is not needed, so that a reduction in operation speedbecause of erasing operation can be prevented. In other words,high-speed operation of the semiconductor device can be realized.

Note that an n-channel transistor in which electrons are majoritycarriers is used in the above description; it is needless to say that ap-channel transistor in which holes are majority carriers can be usedinstead of the n-channel transistor.

<Planar Structure and Cross-Sectional Structure of Semiconductor Device>

FIGS. 2A and 2B illustrate an example of a structure of thesemiconductor device. FIG. 2A illustrates a cross section of thesemiconductor device, and FIG. 2B illustrates a plan view of thesemiconductor device. Here, FIG. 2A corresponds to a cross section alongline A1-A2 and line B1-B2 in FIG. 2B. The semiconductor deviceillustrated in FIGS. 2A and 2B includes the transistor 160 including amaterial other than an oxide semiconductor in a lower portion, and thetransistor 162 including an oxide semiconductor in an upper portion.Note that the transistors 160 and 162 are n-channel transistors here;alternatively, a p-channel transistor may be used. In particular, it iseasy to use a p-channel transistor as the transistor 160.

The transistor 160 includes a channel formation region 116 provided in asubstrate 100 including a semiconductor material, impurity regions 114and high-concentration impurity regions 120 (these regions can becollectively referred to simply as impurity regions) provided so as tosandwich the channel formation region 116, a gate insulating layer 108 aprovided over the channel formation region 116, a gate electrode 110 aprovided over the gate insulating layer 108 a, and a source electrode ordrain electrode (hereinafter referred to as a source/drain electrode)130 a and a source/drain electrode 130 b electrically connected to theimpurity regions 114.

A sidewall insulating layer 118 is provided on a side surface of thegate electrode 110 a. The high-concentration impurity region 120 isplaced in a region of the substrate 100 that does not overlap with thesidewall insulating layer 118 when seen in the cross-sectional view. Ametal compound region 124 is placed over the high-concentration impurityregion 120. An element isolation insulating layer 106 is provided overthe substrate 100 so as to surround the transistor 160. An interlayerinsulating layer 126 and an interlayer insulating layer 128 are providedso as to cover the transistor 160. Each of the source/drain electrode130 a and the source/drain electrode 130 b is electrically connected tothe metal compound region 124 through an opening formed in theinterlayer insulating layers 126 and 128. That is, each of thesource/drain electrodes 130 a and 130 b is electrically connected to thehigh-concentration impurity region 120 and the impurity region 114through the metal compound region 124. An electrode 130 c that is formedin a manner similar to that of the source/drain electrodes 130 a and 130b is electrically connected to the gate electrode 110 a.

The transistor 162 includes a gate electrode 136 d provided over theinterlayer insulating layer 128, a gate insulating layer 138 providedover the gate electrode 136 d, an oxide semiconductor layer 140 providedover the gate insulating layer 138, and a source/drain electrode 142 aand a source/drain electrode 142 b that are provided over the oxidesemiconductor layer 140 and electrically connected to the oxidesemiconductor layer 140.

Here, the gate electrode 136 d is provided so as to be embedded in aninsulating layer 132 formed over the interlayer insulating layer 128.Like the gate electrode 136 d, an electrode 136 a, an electrode 136 b,and an electrode 136 c are formed in contact with the source/drainelectrode 130 a, the source/drain electrode 130 b, and the electrode 130c, respectively.

A protective insulating layer 144 is provided over the transistor 162 soas to be in contact with part of the oxide semiconductor layer 140. Aninterlayer insulating layer 146 is provided over the protectiveinsulating layer 144. Openings that reach the source/drain electrode 142a and the source/drain electrode 142 b are formed in the protectiveinsulating layer 144 and the interlayer insulating layer 146. Anelectrode 150 d and an electrode 150 e are formed in contact with thesource/drain electrode 142 a and the source/drain electrode 142 b,respectively, through the respective openings. Like the electrodes 150 dand 150 e, an electrode 150 a, an electrode 150 b, and an electrode 150c are formed in contact with the electrode 136 a, the electrode 136 b,and the electrode 136 c, respectively, through openings provided in thegate insulating layer 138, the protective insulating layer 144, and theinterlayer insulating layer 146.

Here, the oxide semiconductor layer 140 is preferably a highly purifiedoxide semiconductor layer from which impurities such as hydrogen aresufficiently removed. Specifically, the concentration of hydrogen in theoxide semiconductor layer 140 is 5×10¹⁹/cm³ or less, preferably5×10¹⁸/cm³ or less, more preferably 5×10¹⁷/cm³ or less. Moreover, theoxide semiconductor layer 140 which is highly purified by a sufficientreduction in hydrogen concentration has a carrier concentration of5×10¹⁴/cm³ or less, preferably 5×10¹²/cm³ or less. The transistor 162with excellent off-state current characteristics can be obtained withthe use of such an oxide semiconductor that is highly purified by asufficient reduction in hydrogen concentration and becomes intrinsic orsubstantially intrinsic. For example, when the drain voltage Vd is +1 Vor +10 V and the gate voltage Vg is in the range of −5 V to −20 V, theoff-state current is 1×10⁻¹³ A or less. The oxide semiconductor layer140 which is highly purified by a sufficient reduction in hydrogenconcentration is used so that the off-state current of the transistor162 is reduced, whereby a semiconductor device with a novel structurecan be realized. Note that the concentration of hydrogen in the oxidesemiconductor layer 140 is measured by secondary ion mass spectrometry(SIMS).

An insulating layer 152 is provided over the interlayer insulating layer146. An electrode 154 a, an electrode 154 b, an electrode 154 c, and anelectrode 154 d are provided so as to be embedded in the insulatinglayer 152. The electrode 154 a is in contact with the electrode 150 a.The electrode 154 b is in contact with the electrode 150 b. Theelectrode 154 c is in contact with the electrode 150 c and the electrode150 d. The electrode 154 d is in contact with the electrode 150 e.

That is, in the semiconductor device illustrated in FIGS. 2A and 2B, thegate electrode 110 a of the transistor 160 and the source/drainelectrode 142 a of the transistor 162 are electrically connected throughthe electrodes 130 c, 136 c, 150 c, 154 c, and 150 d.

<Method for Manufacturing Semiconductor Device>

Next, an example of a method for manufacturing the semiconductor devicewill be described. First, a method for manufacturing the transistor 160in the lower portion will be described below with reference to FIGS. 3Ato 3H, and then a method for manufacturing the transistor 162 in theupper portion will be described with reference to FIGS. 4A to 4G andFIGS. 5A to 5D.

<Method for Manufacturing Lower Transistor>

First, the substrate 100 including a semiconductor material is prepared(see FIG. 3A). As the substrate 100 including a semiconductor material,a single crystal semiconductor substrate or a polycrystallinesemiconductor substrate made of silicon, silicon carbide, or the like; acompound semiconductor substrate made of silicon germanium or the like;an SOI substrate; or the like can be used. Here, an example of using asingle crystal silicon substrate as the substrate 100 including asemiconductor material is described. Note that in general, the term “SOIsubstrate” means a substrate where a silicon semiconductor layer isprovided on an insulating surface. In this specification and the like,the term “SOI substrate” also includes a substrate where a semiconductorlayer formed using a material other than silicon is provided over aninsulating surface in its category. That is, a semiconductor layerincluded in the “SOI substrate” is not limited to a siliconsemiconductor layer. Moreover, the SOI substrate can be a substratehaving a structure in which a semiconductor layer is provided over aninsulating substrate such as a glass substrate, with an insulating layertherebetween.

A protective layer 102 serving as a mask for forming an elementisolation insulating layer is formed over the substrate 100 (see FIG.3A). As the protective layer 102, an insulating layer formed usingsilicon oxide, silicon nitride, silicon nitride oxide, or the like canbe used, for example. Note that before or after this step, an impurityelement imparting n-type conductivity or an impurity element impartingp-type conductivity may be added to the substrate 100 in order tocontrol the threshold voltage of the transistor. When the semiconductormaterial included in the substrate 100 is silicon, phosphorus, arsenic,or the like can be used as the impurity imparting n-type conductivity.Boron, aluminum, gallium, or the like can be used as the impurityimparting p-type conductivity.

Next, part of the substrate 100 in a region that is not covered with theprotective layer 102 (i.e., in an exposed region) is removed by etching,using the protective layer 102 as a mask. Thus, an isolatedsemiconductor region 104 is formed (see FIG. 3B). As the etching, dryetching is preferably performed, but wet etching may be performed. Anetching gas and an etchant can be selected as appropriate depending on amaterial of a layer to be etched.

Then, an insulating layer is formed so as to cover the semiconductorregion 104, and the insulating layer in a region overlapping with thesemiconductor region 104 is selectively removed, so that elementisolation insulating layers 106 are formed (see FIG. 3B). The insulatinglayer is formed using silicon oxide, silicon nitride, silicon nitrideoxide, or the like. As a method for removing the insulating layer, anyof etching treatment and polishing treatment such as CMP can beemployed. Note that the protective layer 102 is removed after theformation of the semiconductor region 104 or after the formation of theelement isolation insulating layers 106.

Next, an insulating layer is formed over the semiconductor region 104,and a layer including a conductive material is formed over theinsulating layer.

Because the insulating layer serves as a gate insulating layer later,the insulating layer preferably has a single-layer structure or alayered structure using a film containing silicon oxide, silicon nitrideoxide, silicon nitride, hafnium oxide, aluminum oxide, tantalum oxide,or the like formed by a CVD method, a sputtering method, or the like.Alternatively, the insulating layer may be formed in such a manner thata surface of the semiconductor region 104 is oxidized or nitrided byhigh-density plasma treatment or thermal oxidation treatment. Thehigh-density plasma treatment can be performed using, for example, amixed gas of a rare gas such as He, Ar, Kr, or Xe and a gas such asoxygen, nitrogen oxide, ammonia, nitrogen, or hydrogen. There is noparticular limitation on the thickness of the insulating layer; theinsulating layer can have a thickness of 1 nm to 100 nm inclusive, forexample.

The layer including a conductive material can be formed using a metalmaterial such as aluminum, copper, titanium, tantalum, or tungsten. Thelayer including a conductive material may be formed using asemiconductor material such as polycrystalline silicon containing aconductive material. There is no particular limitation on the method forforming the layer containing a conductive material, and a variety offilm formation methods such as an evaporation method, a CVD method, asputtering method, or a spin coating method can be employed. Note thatthis embodiment shows an example of the case where the layer containinga conductive material is formed using a metal material.

After that, the insulating layer and the layer including a conductivematerial are selectively etched, so that the gate insulating layer 108 aand the gate electrode 110 a are formed (see FIG. 3C).

Next, an insulating layer 112 that covers the gate electrode 110 a isformed (see FIG. 3C). Then, the impurity regions 114 with a shallowjunction depth are formed by adding phosphorus (P), arsenic (As), or thelike to the semiconductor region 104 (see FIG. 3C). Note that phosphorusor arsenic is added here in order to form an n-channel transistor; animpurity element such as boron (B) or aluminum (Al) may be added in thecase of forming a p-channel transistor. With the formation of theimpurity regions 114, the channel formation region 116 is formed in thesemiconductor region 104 below the gate insulating layer 108 a (see FIG.3C). Here, the concentration of the impurity added can be set asappropriate; the concentration is preferably increased when the size ofa semiconductor element is extremely decreased. The step in which theimpurity regions 114 are formed after the formation of the insulatinglayer 112 is employed here; alternatively, the insulating layer 112 maybe formed after the formation of the impurity regions 114.

Next, the sidewall insulating layers 118 are formed (see FIG. 3D). Aninsulating layer is formed so as to cover the insulating layer 112 andthen subjected to highly anisotropic etching, whereby the sidewallinsulating layers 118 can be formed in a self-aligned manner. At thistime, it is preferable to partly etch the insulating layer 112 so that atop surface of the gate electrode 110 a and top surfaces of the impurityregions 114 are exposed.

Then, an insulating layer is formed so as to cover the gate electrode110 a, the impurity regions 114, the sidewall insulating layers 118, andthe like. Next, phosphorus (P), arsenic (As), or the like is added toregions in contact with the impurity regions 114, so that thehigh-concentration impurity regions 120 are formed (see FIG. 3E). Afterthat, the insulating layer is removed, and a metal layer 122 is formedso as to cover the gate electrode 110 a, the sidewall insulating layers118, the high-concentration impurity regions 120, and the like (see FIG.3E). A variety of film formation methods such as a vacuum evaporationmethod, a sputtering method, or a spin coating method can be employedfor forming the metal layer 122. The metal layer 122 is preferablyformed using a metal material that reacts with a semiconductor materialincluded in the semiconductor region 104 to be a low-resistance metalcompound. Examples of such a metal material are titanium, tantalum,tungsten, nickel, cobalt, and platinum.

Next, heat treatment is performed so that the metal layer 122 reactswith the semiconductor material. Thus, the metal compound regions 124that are in contact with the high-concentration impurity regions 120 areformed (see FIG. 3F). Note that when the gate electrode 110 a is formedusing polycrystalline silicon or the like, a metal compound region isalso formed in a region of the gate electrode 110 a in contact with themetal layer 122.

As the heat treatment, irradiation with a flash lamp can be employed,for example. Although it is needless to say that another heat treatmentmethod may be used, a method by which heat treatment for an extremelyshort time can be achieved is preferably used in order to improve thecontrollability of chemical reaction in formation of the metal compound.Note that the metal compound regions are formed by reaction of the metalmaterial and the semiconductor material and have sufficiently highconductivity. The formation of the metal compound regions can properlyreduce the electric resistance and improve element characteristics. Notethat the metal layer 122 is removed after the metal compound regions 124are formed.

Then, the interlayer insulating layer 126 and the interlayer insulatinglayer 128 are formed so as to cover the components formed in the abovesteps (see FIG. 3G). The interlayer insulating layers 126 and 128 can beformed using an inorganic insulating material such as silicon oxide,silicon nitride oxide, silicon nitride, hafnium oxide, aluminum oxide,or tantalum oxide. Moreover, the interlayer insulating layers 126 and128 can be formed using an organic insulating material such as polyimideor acrylic. Note that a two-layer structure of the interlayer insulatinglayer 126 and the interlayer insulating layer 128 is employed here;however, the structure of an interlayer insulating layer is not limitedto this structure. After the formation of the interlayer insulatinglayer 128, a surface of the interlayer insulating layer 128 ispreferably planarized with CMP, etching, or the like.

Then, openings that reach the metal compound regions 124 are formed inthe interlayer insulating layers, and the source/drain electrode 130 aand the source/drain electrode 130 b are formed in the openings (seeFIG. 3H). The source/drain electrodes 130 a and 130 b can be formed insuch a manner, for example, that a conductive layer is formed in aregion including the openings by a PVD method, a CVD method, or the likeand then part of the conductive layer is removed by etching, CMP, or thelike.

Note that in the case where the source/drain electrodes 130 a and 130 bare formed by removing part of the conductive layer, the process ispreferably performed so that the surfaces are planarized. For example,when a thin titanium film or a thin titanium nitride film is formed in aregion including the openings and then a tungsten film is formed so asto be embedded in the openings, excess tungsten, titanium, titaniumnitride, or the like is removed and the planarity of the surface can beimproved by subsequent CMP. The surface including the source/drainelectrodes 130 a and 130 b is planarized in such a manner, so that anelectrode, a wiring, an insulating layer, a semiconductor layer, and thelike can be favorably formed in later steps.

Note that only the source/drain electrodes 130 a and 130 b in contactwith the metal compound regions 124 are shown here; however, anelectrode that is in contact with the gate electrode 110 a (e.g., theelectrode 130 c in FIG. 2A) and the like can also be formed in thisstep. There is no particular limitation on a material used for thesource/drain electrodes 130 a and 130 b, and a variety of conductivematerials can be used. For example, a conductive material such asmolybdenum, titanium, chromium, tantalum, tungsten, aluminum, copper,neodymium, or scandium can be used.

Through the above steps, the transistor 160 using the substrate 100including a semiconductor material is formed. Note that an electrode, awiring, an insulating layer, or the like may be further formed after theabove step. When the wirings have a multi-layer structure of a layeredstructure including an interlayer insulating layer and a conductivelayer, a highly integrated semiconductor device can be provided.

<Method for Manufacturing Upper Transistor>

Next, steps for manufacturing the transistor 162 over the interlayerinsulating layer 128 will be described with reference to FIGS. 4A to 4Gand FIGS. 5A to 5D. Note that FIGS. 4A to 4G and FIGS. 5A to 5Dillustrate steps for manufacturing electrodes, the transistor 162, andthe like over the interlayer insulating layer 128; therefore, thetransistor 160 and the like placed below the transistor 162 are omitted.

First, the insulating layer 132 is formed over the interlayer insulatinglayer 128, the source/drain electrodes 130 a and 130 b, and theelectrode 130 c (see FIG. 4A). The insulating layer 132 can be formed bya PVD method, a CVD method, or the like. The insulating layer 132 can beformed using an inorganic insulating material such as silicon oxide,silicon nitride oxide, silicon nitride, hafnium oxide, aluminum oxide,or tantalum oxide.

Next, openings that reach the source/drain electrodes 130 a and 130 band the electrode 130 c are formed in the insulating layer 132. At thistime, an opening is also formed in a region where the gate electrode 136d is to be formed later. Then, a conductive layer 134 is formed so as tobe embedded in the openings (see FIG. 4B). The openings can be formed bya method such as etching using a mask. The mask can be formed by amethod such as light exposure using a photomask. Either wet etching ordry etching may be used as the etching; dry etching is preferably usedin terms of microfabrication. The conductive layer 134 can be formed bya film formation method such as a PVD method or a CVD method. Theconductive layer 134 can be formed using a conductive material such asmolybdenum, titanium, chromium, tantalum, tungsten, aluminum, copper,neodymium, or scandium or an alloy or a compound (e.g., a nitride) ofany of these materials, for example.

Specifically, it is possible to employ a method, for example, in which athin titanium film is formed in a region including the openings by a PVDmethod and a thin titanium nitride film is formed by a CVD method, andthen, a tungsten film is formed so as to be embedded in the openings.Here, the titanium film formed by a PVD method has a function ofreducing an oxide film at the interface with the insulating layer 132 todecrease the contact resistance with lower electrodes (here, thesource/drain electrodes 130 a and 130 b, the electrode 130 c, and thelike). The titanium nitride film formed after the formation of thetitanium film has a barrier function of preventing diffusion of theconductive material. A copper film may be formed by a plating methodafter the formation of the barrier film of titanium, titanium nitride,or the like.

After the conductive layer 134 is formed, part of the conductive layer134 is removed by etching, CMP, or the like, so that the insulatinglayer 132 is exposed and the electrodes 136 a, 136 b, and 136 c and thegate electrode 136 d are formed (see FIG. 4C). Note that when theelectrodes 136 a, 136 b, and 136 c and the gate electrode 136 d areformed by removing part of the conductive layer 134, the process ispreferably performed so that the surfaces are planarized. The surfacesof the insulating layer 132, the electrodes 136 a, 136 b, and 136 c, andthe gate electrode 136 d are planarized in such a manner, whereby anelectrode, a wiring, an insulating layer, a semiconductor layer, and thelike can be favorably formed in later steps.

Next, the gate insulating layer 138 is formed so as to cover theinsulating layer 132, the electrodes 136 a, 136 b, and 136 c, and thegate electrode 136 d (see FIG. 4D). The gate insulating layer 138 can beformed by a CVD method, a sputtering method, or the like. The gateinsulating layer 138 is preferably formed using silicon oxide, siliconnitride, silicon oxynitride, silicon nitride oxide, aluminum oxide,hafnium oxide, tantalum oxide, or the like. Note that the gateinsulating layer 138 may have a single-layer structure or a layeredstructure. For example, the gate insulating layer 138 made of siliconoxynitride can be formed by a plasma CVD method using silane (SiH₄),oxygen, and nitrogen as a source gas. There is no particular limitationon the thickness of the gate insulating layer 138; the gate insulatinglayer 138 can have a thickness of 10 nm to 500 nm inclusive, for exampleIn the case of employing a layered structure, for example, the gateinsulating layer 138 is preferably a stack of a first gate insulatinglayer having a thickness of 50 nm to 200 nm inclusive, and a second gateinsulating layer with a thickness of 5 nm to 300 nm inclusive over thefirst gate insulating layer.

Note that an oxide semiconductor that becomes intrinsic or substantiallyintrinsic by removal of impurities (a highly purified oxidesemiconductor) is quite susceptible to the interface level and theinterface charge; therefore, when such an oxide semiconductor is usedfor an oxide semiconductor layer, the interface with the gate insulatinglayer is important. In other words, the gate insulating layer 138 thatis to be in contact with a highly purified oxide semiconductor layerneeds to have high quality.

For example, the gate insulating layer 138 is preferably formed by ahigh-density plasma CVD method using a microwave (2.45 GHz) because thegate insulating layer 138 can be dense and have high withstand voltageand high quality. When a highly purified oxide semiconductor layer and ahigh-quality gate insulating layer are in close contact with each other,the interface level can be reduced and interface characteristics can befavorable.

It is needless to say that, even when a highly purified oxidesemiconductor layer is used, another method such as a sputtering methodor a plasma CVD method can be employed as long as a high-qualityinsulating layer can be formed as a gate insulating layer. Moreover, itis possible to use an insulating layer whose quality and interfacecharacteristics are improved with heat treatment performed after theformation of the insulating layer. In any case, an insulating layer thathas favorable film quality as the gate insulating layer 138 and canreduce interface level density with an oxide semiconductor layer to forma favorable interface is formed as the gate insulating layer 138.

In a gate bias-temperature stress test (BT test) at 85° C. with 2×10⁶V/cm for 12 hours, if an impurity is added to an oxide semiconductor, abond between the impurity and a main component of the oxidesemiconductor is broken by a high electric field (B: bias) and hightemperature (T: temperature), and a dangling bond generated causes adrift of the threshold voltage (Vth).

In contrast, impurities of an oxide semiconductor, particularly hydrogenand water, are reduced to a minimum and interface characteristicsbetween the oxide semiconductor and the gate insulating layer are madefavorable as described above, whereby a transistor that is stablethrough the BT test can be obtained.

Next, an oxide semiconductor layer is formed over the gate insulatinglayer 138 and processed by a method such as etching using a mask, sothat the island-shaped oxide semiconductor layer 140 is formed (see FIG.4E).

As the oxide semiconductor layer, it is preferable to use anIn—Ga—Zn—O-based oxide semiconductor layer, an In—Sn—Zn—O-based oxidesemiconductor layer, an In—Al—Zn—O-based oxide semiconductor layer, aSn—Ga—Zn—O-based oxide semiconductor layer, an Al—Ga—Zn—O-based oxidesemiconductor layer, a Sn—Al—Zn—O-based oxide semiconductor layer, anIn—Zn—O-based oxide semiconductor layer, a Sn—Zn—O-based oxidesemiconductor layer, an Al—Zn—O-based oxide semiconductor layer, anIn—O-based oxide semiconductor layer, a Sn—O-based oxide semiconductorlayer, or a Zn—O-based oxide semiconductor layer, which is preferablyamorphous in particular. In this embodiment, as the oxide semiconductorlayer, an amorphous oxide semiconductor layer is formed by a sputteringmethod using a target for depositing an In—Ga—Zn—O-based oxidesemiconductor. Note that since crystallization of an amorphous oxidesemiconductor layer can be suppressed by adding silicon to the amorphousoxide semiconductor layer, an oxide semiconductor layer may be formed,for example, using a target containing SiO₂ of 2 wt % to 10 wt %inclusive.

As a target used for forming an oxide semiconductor layer by asputtering method, a metal oxide target containing zinc oxide as itsmain component can be used, for example. Moreover, a target fordepositing an oxide semiconductor containing In, Ga, and Zn (acomposition ratio of In₂O₃:Ga₂O₃:ZnO=1:1:1 [mol %] and In:Ga:Zn=1:1:0.5[atom %]) can be used, for example. Furthermore, a target for depositingan oxide semiconductor containing In, Ga, and Zn (a composition ratio ofIn:Ga:Zn=1:1:1 [atom %] or a composition ratio of In:Ga:Zn=1:1:2 [atom%]) may be used. The filling rate of a target for depositing an oxidesemiconductor is 90% to 100% inclusive, preferably greater than or equalto 95% (e.g., 99.9%). A dense oxide semiconductor layer is formed usinga target for depositing an oxide semiconductor with a high filling rate.

The atmosphere in which the oxide semiconductor layer is formed ispreferably a rare gas (typically argon) atmosphere, an oxygenatmosphere, or a mixed atmosphere containing a rare gas (typicallyargon) and oxygen. Specifically, it is preferable to use a high-puritygas, for example, from which an impurity such as hydrogen, water, ahydroxyl group, or hydride is removed so that the concentration is inthe ppm range (preferably the ppb range).

In forming the oxide semiconductor layer, the substrate is held in atreatment chamber that is maintained at reduced pressure and thesubstrate temperature is set to 100° C. to 600° C. inclusive, preferably200° C. to 400° C. inclusive. The oxide semiconductor layer is formedwhile the substrate is heated, so that the impurity concentration of theoxide semiconductor layer can be reduced. Moreover, damage due tosputtering is reduced.

Then, a sputtering gas from which hydrogen and water are removed isintroduced into the treatment chamber from which remaining moisture isbeing removed, and the oxide semiconductor layer is formed using metaloxide as a target. An entrapment vacuum pump is preferably used in orderto remove moisture remaining in the treatment chamber. For example, acryopump, an ion pump, or a titanium sublimation pump can be used. Anevacuation unit may be a turbo pump provided with a cold trap. In thedeposition chamber that is evacuated with the cryopump, a hydrogen atomand a compound containing a hydrogen atom such as water (H₂O) (andpreferably also a compound containing a carbon atom), for example, areremoved, whereby the impurity concentration of the oxide semiconductorlayer formed in the deposition chamber can be reduced.

The oxide semiconductor layer can be formed under the followingconditions, for example: the distance between the substrate and thetarget is 100 mm; the pressure is 0.6 Pa; the direct-current (DC) powersupply is 0.5 kW; and the atmosphere is oxygen (the flow rate ratio ofoxygen is 100%). Note that it is preferable to use a pulse directcurrent (DC) power supply because powder substances (also referred to asparticles or dust) generated in film deposition can be reduced and thethickness distribution is uniform. The thickness of the oxidesemiconductor layer is 2 nm to 200 nm inclusive, preferably 5 nm to 30nm inclusive. Note that an appropriate thickness differs depending on anoxide semiconductor material, and the thickness is set as appropriatedepending on the material to be used.

Note that before the oxide semiconductor layer is formed by a sputteringmethod, dust on a surface of the gate insulating layer 138 is preferablyremoved by reverse sputtering in which an argon gas is introduced andplasma is generated. Here, the reverse sputtering is a method by whichions collide with a surface to be processed so that the surface ismodified, in contrast to normal sputtering by which ions collide with asputtering target. An example of a method for making ions collide with asurface to be processed is a method in which high-frequency voltage isapplied to the surface in an argon atmosphere so that plasma isgenerated near a substrate. Note that an atmosphere of nitrogen, helium,oxygen, or the like may be used instead of an argon atmosphere.

As an etching method for the oxide semiconductor layer, either dryetching or wet etching may be employed. It is needless to say that dryetching and wet etching can be used in combination. The etchingconditions (e.g., an etching gas or an etching solution, etching time,and temperature) are set as appropriate depending on the material sothat the oxide semiconductor layer can be etched into a desired shape.

An example of an etching gas used for dry etching is a gas containingchlorine (a chlorine-based gas such as chlorine (Cl₂), boron chloride(BCl₃), silicon chloride (SiCl₄), or carbon tetrachloride (CCl₄)).Moreover, a gas containing fluorine (a fluorine-based gas such as carbontetrafluoride (CF₄), sulfur fluoride (SF), nitrogen fluoride (NF₃), ortrifluoromethane (CHF₃)), hydrogen bromide (HBr), oxygen (O₂), any ofthese gases to which a rare gas such as helium (He) or argon (Ar) isadded, or the like may be used.

As the dry etching method, a parallel plate RIE (reactive ion etching)method or an ICP (inductively coupled plasma) etching method can beused. In order to etch the oxide semiconductor layer into a desiredshape, etching conditions (e.g., the amount of electric power applied toa coiled electrode, the amount of electric power applied to an electrodeon the substrate side, and the electrode temperature on the substrateside) are set as appropriate.

As an etchant used for wet etching, a mixed solution of phosphoric acid,acetic acid, and nitric acid, an ammonia peroxide mixture (hydrogenperoxide solution of 31 wt %:ammonia solution of 28 wt %:water=5:2:2),or the like can be used. An etchant such as ITO07N (produced by KANTOCHEMICAL CO., INC.) may also be used.

Then, first heat treatment is preferably performed on the oxidesemiconductor layer. The oxide semiconductor layer can be dehydrated ordehydrogenated with the first heat treatment. The temperature of thefirst heat treatment is greater than or equal to 300° C. and less thanor equal to 750° C., preferably greater than or equal to 400° C. andless than the strain point of the substrate. For example, the substrateis introduced into an electric furnace in which a resistance heatingelement or the like is used and the oxide semiconductor layer 140 issubjected to heat treatment at 450° C. for one hour in a nitrogenatmosphere. The oxide semiconductor layer 140 is not exposed to the airduring the heat treatment so that entry of water and hydrogen can beprevented.

The heat treatment apparatus is not limited to the electric furnace andcan be an apparatus for heating an object by thermal radiation orthermal conduction from a medium such as a heated gas. For example, arapid thermal annealing (RTA) apparatus such as a gas rapid thermalannealing (GRTA) apparatus or a lamp rapid thermal annealing (LRTA)apparatus can be used. An LRTA apparatus is an apparatus for heating anobject to be processed by radiation of light (an electromagnetic wave)emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenonarc lamp, a carbon arc lamp, a high pressure sodium lamp, or a highpressure mercury lamp. A GRTA apparatus is an apparatus for performingheat treatment using a high-temperature gas. As the gas, an inert gasthat does not react with an object by heat treatment, for example,nitrogen or a rare gas such as argon is used.

For example, as the first heat treatment, a GRTA process may beperformed as follows. The substrate is put in an inert gas that has beenheated to a high temperature of 650° C. to 700° C., heated for severalminutes, and taken out of the inert gas. The GRTA process enableshigh-temperature heat treatment for a short time. Moreover, the GRTAprocess can be employed even when the temperature exceeds the strainpoint of the substrate because it is heat treatment for a short time.

Note that the first heat treatment is preferably performed in anatmosphere that contains nitrogen or a rare gas (e.g., helium, neon, orargon) as its main component and does not contain water, hydrogen, orthe like. For example, the purity of nitrogen or a rare gas such ashelium, neon, or argon introduced into a heat treatment apparatus isgreater than or equal to 6 N (99.9999%), preferably greater than orequal to 7 N (99.99999%) (i.e., the impurity concentration is less thanor equal to 1 ppm, preferably less than or equal to 0.1 ppm).

Depending on the conditions of the first heat treatment or the materialof the oxide semiconductor layer, the oxide semiconductor layer issometimes crystallized to be microcrystalline or polycrystalline. Forexample, the oxide semiconductor layer sometimes becomes amicrocrystalline oxide semiconductor layer having a degree ofcrystallization of 90% or more, or 80% or more. Further, depending onthe conditions of the first heat treatment or the material of the oxidesemiconductor layer, the oxide semiconductor layer may be an amorphousoxide semiconductor layer containing no crystalline component.

Furthermore, in the oxide semiconductor layer, a microcrystal (the grainsize is 1 nm to 20 nm inclusive, typically 2 nm to 4 nm inclusive) issometimes mixed in an amorphous oxide semiconductor (e.g., a surface ofthe oxide semiconductor layer).

The electrical characteristics of the oxide semiconductor layer can bechanged by aligning microcrystals in an amorphous semiconductor. Forexample, when the oxide semiconductor layer is formed using a target fordepositing In—Ga—Zn—O-based oxide semiconductor, the electricalcharacteristics of the oxide semiconductor layer can be changed byformation of a microcrystalline portion in which crystal grains ofIn₂Ga₂ZnO₇ with electrical anisotropy are aligned.

Specifically, for example, when the crystal grains are arranged so thatthe c-axis of In₂Ga₂ZnO₇ is perpendicular to a surface of the oxidesemiconductor layer, the conductivity in the direction parallel to thesurface of the oxide semiconductor layer can be improved and insulatingproperties in the direction perpendicular to the surface of the oxidesemiconductor layer can be improved. Furthermore, such amicrocrystalline portion has a function of suppressing entry of animpurity such as water or hydrogen into the oxide semiconductor layer.

Note that the oxide semiconductor layer including the microcrystallineportion can be formed by heating the surface of the oxide semiconductorlayer by a GRTA process. Further, the oxide semiconductor layer can beformed in a more preferred manner by using a sputtering target in whichthe amount of Zn is smaller than that of In or Ga.

The first heat treatment for the oxide semiconductor layer 140 can beperformed on the oxide semiconductor layer that has not yet beenprocessed into the island-shaped oxide semiconductor layer 140. In thatcase, after the first heat treatment, the substrate is taken out of theheating apparatus and a photolithography step is performed.

Note that the above-described heat treatment can be referred to asdehydration treatment, dehydrogenation treatment, or the like because ofits effect of dehydration or dehydrogenation on the oxide semiconductorlayer 140. Such dehydration treatment or dehydrogenation treatment canbe performed, for example, after the oxide semiconductor layer isformed, after a source electrode and a drain electrode are stacked overthe oxide semiconductor layer 140, or after a protective insulatinglayer is formed over the source and drain electrodes. Such dehydrationtreatment or dehydrogenation treatment may be performed once or pluraltimes.

Next, the source/drain electrode 142 a and the source/drain electrode142 b are formed in contact with the oxide semiconductor layer 140 (seeFIG. 4F). The source/drain electrodes 142 a and 142 b can be formed insuch a manner that a conductive layer is formed so as to cover the oxidesemiconductor layer 140 and then is selectively etched.

The conductive layer can be formed by a PVD method such as a sputteringmethod, or a CVD method such as a plasma CVD method. As a material forthe conductive layer, an element selected from aluminum, chromium,copper, tantalum, titanium, molybdenum, or tungsten; an alloy containingany of these elements as a component; or the like can be used. Moreover,one or more materials selected from manganese, magnesium, zirconium,beryllium, or thorium may be used. Aluminum combined with one or more ofelements selected from titanium, tantalum, tungsten, molybdenum,chromium, neodymium, or scandium may be used. The conductive layer canhave a single-layer structure or a layered structure including two ormore layers. For example, the conductive layer can have a single-layerstructure of an aluminum film containing silicon, a two-layer structurein which a titanium film is stacked over an aluminum film, or athree-layer structure in which a titanium film, an aluminum film, and atitanium film are stacked in this order.

Here, ultraviolet light, KrF laser light, or ArF laser light ispreferably used for light exposure in forming a mask used for etching.

The channel length (L) of the transistor is determined by a distancebetween a lower edge portion of the source/drain electrode 142 a and alower edge portion of the source/drain electrode 142 b. Note that forlight exposure in the case where the channel length (L) is less than 25nm, light exposure for forming a mask is performed with extremeultraviolet rays whose wavelength is several nanometers to severalhundreds of nanometers, which is extremely short. The resolution oflight exposure with extreme ultraviolet rays is high and the depth offocus is large. For these reasons, the channel length (L) of thetransistor to be formed later can be in the range of 10 nm to 1000 nm,and the circuit can operate at higher speed. Moreover, the off-statecurrent is extremely low, which prevents power consumption fromincreasing.

The materials and etching conditions of the conductive layer and theoxide semiconductor layer 140 are adjusted as appropriate so that theoxide semiconductor layer 140 is not removed in etching of theconductive layer. Note that in some cases, the oxide semiconductor layer140 is partly etched in the etching step and thus has a groove portion(a recessed portion) depending on the materials and the etchingconditions.

An oxide conductive layer may be formed between the oxide semiconductorlayer 140 and the source/drain electrode 142 a and between the oxidesemiconductor layer 140 and the source/drain electrode 142 b. The oxideconductive layer and a metal layer for forming the source/drainelectrodes 142 a and 142 b can be successively formed. The oxideconductive layer can function as a source region and a drain region. Theplacement of such an oxide conductive layer can reduce the resistance ofthe source region and the drain region, so that the transistor canoperate at high speed.

In order to reduce the number of masks to be used and reduce the numberof steps, an etching step may be performed with the use of a resist maskformed using a multi-tone mask which is a light-exposure mask throughwhich light is transmitted to have a plurality of intensities. A resistmask formed with the use of a multi-tone mask has a plurality ofthicknesses (has a stair-like shape) and further can be changed in shapeby ashing; therefore, the resist mask can be used in a plurality ofetching steps for processing into different patterns. That is, a resistmask corresponding to at least two kinds of different patterns can beformed by using a multi-tone mask. Thus, the number of light-exposuremasks can be reduced and the number of corresponding photolithographysteps can also be reduced, whereby a process can be simplified.

Note that plasma treatment is preferably performed with the use of a gassuch as N₂O, N₂, or Ar after the above step. This plasma treatmentremoves water or the like attached on an exposed surface of the oxidesemiconductor layer. Plasma treatment may be performed using a mixed gasof oxygen and argon.

Next, the protective insulating layer 144 is formed in contact with partof the oxide semiconductor layer 140 without exposure to the air (seeFIG. 4G).

The protective insulating layer 144 can be formed by a method by whichimpurities such as water and hydrogen are prevented from being mixed tothe protective insulating layer 144, such as a sputtering method, asappropriate. The protective insulating layer 144 has a thickness of atleast 1 nm. The protective insulating layer 144 can be formed usingsilicon oxide, silicon nitride, silicon oxynitride, silicon nitrideoxide, or the like. The protective insulating layer 144 can have asingle-layer structure or a layered structure. The substrate temperaturein forming the protective insulating layer 144 is preferably higher thanor equal to room temperature and lower than or equal to 300° C. Theatmosphere for forming the protective insulating layer 144 is preferablya rare gas (typically argon) atmosphere, an oxygen atmosphere, or amixed atmosphere containing a rare gas (typically argon) and oxygen.

If hydrogen is contained in the protective insulating layer 144, thehydrogen may enter the oxide semiconductor layer or extract oxygen inthe oxide semiconductor layer, whereby the resistance of the oxidesemiconductor layer on the backchannel side might be decreased and aparasitic channel might be formed. Therefore, it is important not to usehydrogen in forming the protective insulating layer 144 so that theoxide insulating layer 144 contains hydrogen as little as possible.

Moreover, the protective insulating layer 144 is preferably formed whilewater left in the treatment chamber is removed, in order that hydrogen,a hydroxyl group, or moisture is not contained in the oxidesemiconductor layer 140 and the protective insulating layer 144.

An entrapment vacuum pump is preferably used in order to remove moistureremaining in the treatment chamber. For example, a cryopump, an ionpump, or a titanium sublimation pump is preferably used. An evacuationunit may be a turbo pump provided with a cold trap. In the depositionchamber that is evacuated with the cryopump, a hydrogen atom and acompound containing a hydrogen atom, such as water (H₂O), are removed,for example; thus, the impurity concentration of the protectiveinsulating layer 144 formed in the deposition chamber can be reduced.

As a sputtering gas used for forming the protective insulating layer144, it is preferable to use a high-purity gas from which an impuritysuch as hydrogen, water, a hydroxyl group, or hydride is removed so thatthe concentration is in the ppm range (preferably the ppb range).

Next, second heat treatment is preferably performed in an inert gasatmosphere or an oxygen gas atmosphere (at 200° C. to 400° C. inclusive,for example, at 250° C. to 350° C. inclusive). For example, the secondheat treatment is performed at 250° C. for one hour in a nitrogenatmosphere. The second heat treatment can reduce variation in electriccharacteristics of the transistor.

Furthermore, heat treatment may be performed at 100° C. to 200° C. forone hour to 30 hours in the air. This heat treatment may be performed ata fixed heating temperature; alternatively, the following change in theheating temperature may be conducted plural times repeatedly: theheating temperature is increased from room temperature to a temperatureof 100° C. to 200° C. and then decreased to room temperature. This heattreatment may be performed under a reduced pressure before theprotective insulating layer is formed. The heat treatment time can beshortened under the reduced pressure. This heat treatment may beperformed instead of the second heat treatment or may be performedbefore or after the second heat treatment, for example.

Next, the interlayer insulating layer 146 is formed over the protectiveinsulating layer 144 (see FIG. 5A). The interlayer insulating layer 146can be formed by a PVD method, a CVD method, or the like. The interlayerinsulating layer 146 can be formed using an inorganic insulatingmaterial such as silicon oxide, silicon nitride oxide, silicon nitride,hafnium oxide, aluminum oxide, or tantalum oxide. After the formation ofthe interlayer insulating layer 146, a surface of the interlayerinsulating layer 146 is preferably planarized with CMP, etching, or thelike.

Next, openings that reach the electrodes 136 a, 136 b, and 136 c and thesource/drain electrodes 142 a and 142 b are formed in the interlayerinsulating layer 146, the protective insulating layer 144, and the gateinsulating layer 138. Then, a conductive layer 148 is formed so as to beembedded in the openings (see FIG. 5B). The openings can be formed by amethod such as etching using a mask. The mask can be formed by a methodsuch as light exposure using a photomask. Either wet etching or dryetching may be used as the etching; dry etching is preferably used interms of microfabrication. The conductive layer 148 can be formed by afilm formation method such as a PVD method or a CVD method. Theconductive layer 148 can be formed using a conductive material such asmolybdenum, titanium, chromium, tantalum, tungsten, aluminum, copper,neodymium, or scandium or an alloy or a compound (e.g., a nitride) ofany of these materials, for example.

Specifically, it is possible to employ a method, for example, in which athin titanium film is formed in a region including the openings by a PVDmethod and a thin titanium nitride film is formed by a CVD method, andthen, a tungsten film is formed so as to be embedded in the openings.Here, the titanium film formed by a PVD method has a function ofreducing an oxide film at the interface with the interlayer insulatinglayer 146 to decrease the contact resistance with lower electrodes(here, the electrodes 136 a, 136 b, and 136 c and the source/drainelectrodes 142 a and 142 b). The titanium nitride film formed after theformation of the titanium film has a barrier function of preventingdiffusion of the conductive material. A copper film may be formed by aplating method after the formation of the barrier film of titanium,titanium nitride, or the like.

After the conductive layer 148 is formed, part of the conductive layer148 is removed by etching, CMP, or the like, so that the interlayerinsulating layer 146 is exposed and the electrodes 150 a, 150 b, 150 c,150 d, and 150 e are formed (see FIG. 5C). Note that when the electrodes150 a, 150 b, 150 c, 150 d, and 150 e are formed by removing part of theconductive layer 148, the process is preferably performed so that thesurfaces are planarized. The surfaces of the interlayer insulating layer146 and the electrodes 150 a, 150 b, 150 c, 150 d, and 150 e areplanarized in such a manner, whereby an electrode, a wiring, aninsulating layer, a semiconductor layer, and the like can be favorablyformed in later steps.

Then, the insulating layer 152 is formed, and openings that reach theelectrodes 150 a, 150 b, 150 c, 150 d, and 150 e are formed in theinsulating layer 152. After a conductive layer is formed so as to beembedded in the openings, part of the conductive layer is removed byetching, CMP, or the like. Thus, the insulating layer 152 is exposed andthe electrodes 154 a, 154 b, 154 c, and 154 d are formed (see FIG. 5D).This step is similar to the step of forming the electrode 150 a and thelike; therefore, the detailed description is not repeated.

In the case where the transistor 162 is formed by the above-describedmethod, the hydrogen concentration of the oxide semiconductor layer 140is 5×10¹⁹/cm³ or less and the off-state current of the transistor 162 is1×10⁻¹³ A or less. The transistor 162 with excellent characteristics canbe obtained by the application of the oxide semiconductor layer 140 thatis highly purified by a sufficient reduction in hydrogen concentrationas described above. Moreover, it is possible to manufacture asemiconductor device that has excellent characteristics and includes thetransistor 160 formed using a material other than an oxide semiconductorin the lower portion and the transistor 162 formed using an oxidesemiconductor in the upper portion.

Note that silicon carbide (e.g., 4H—SiC) is a semiconductor materialthat can be compared to an oxide semiconductor. An oxide semiconductorand 4H—SiC have some things in common. One example is carrier density.Using the Femi-Dirac distribution at room temperature, the density ofminority carriers in the oxide semiconductor is estimated to beapproximately 1×10⁻⁷/cm³, which is as extremely low as 6.7×10⁻¹¹/cm³ of4H—SiC. When the minority carrier density of the oxide semiconductor iscompared with the intrinsic carrier density of silicon (approximately1.4×10¹⁰/cm³), it is easy to understand that the minority carrierdensity of the oxide semiconductor is significantly low.

In addition, the energy band gap of the oxide semiconductor is 3.0 eV to3.5 eV and that of 4H—SiC is 3.26 eV, which means that both the oxidesemiconductor and silicon carbide are wide bandgap semiconductors.

In contrast, there is a major difference between the oxide semiconductorand silicon carbide, that is, the process temperature. Heat treatmentfor activation at 1500° C. to 2000° C. is usually needed in asemiconductor process using silicon carbide, so that it is difficult toform a stack of silicon carbide and a semiconductor element formed usinga semiconductor material other than silicon carbide. This is because asemiconductor substrate, a semiconductor element, and the like aredamaged by such high temperature. On the other hand, the oxidesemiconductor can be formed with heat treatment at 300° C. to 500° C.(at a temperature equal to or lower than the glass transitiontemperature, approximately 700° C. at the maximum); therefore, asemiconductor element can be formed using an oxide semiconductor afteran integrated circuit is formed using another semiconductor material.

The oxide semiconductor has an advantage over silicon carbide in that alow heat-resistant substrate such as a glass substrate can be used.Moreover, the oxide semiconductor also has an advantage in that energycosts can be sufficiently reduced as compared to silicon carbide becauseheat temperature at high temperature is not necessary.

Note that considerable research has been done on properties of oxidesemiconductors, such as the density of states (DOS); however, theresearch does not include the idea of sufficiently reducing the DOSitself. According to one embodiment of the invention disclosed herein, ahighly purified oxide semiconductor is manufactured by removing waterand hydrogen which might affect the DOS from the oxide semiconductor.This is based on the idea of sufficiently reducing the DOS itself. Thus,excellent industrial products can be manufactured.

Further, it is also possible to realize a more highly purified (i-type)oxide semiconductor in such a manner that oxygen is supplied to metaldangling bonds generated by oxygen vacancy so that the DOS due to oxygenvacancy is reduced. For example, an oxide film containing an excessiveamount of oxygen is formed in close contact with a channel formationregion and oxygen is supplied from the oxide film, whereby the DOS dueto oxygen vacancy can be reduced.

A defect of the oxide semiconductor is said to be attributed to ashallow level of 0.1 eV to 0.2 eV below the conduction band due toexcessive hydrogen, a deep level due to shortage of oxygen, or the like.The technical idea that hydrogen is drastically reduced and oxygen isadequately supplied in order to eliminate such a defect would be right.

An oxide semiconductor is generally considered as an n-typesemiconductor; however, according to one embodiment of the inventiondisclosed herein, an i-type semiconductor is realized by removingimpurities, particularly water and hydrogen. In this respect, it can besaid that one embodiment of the invention disclosed herein includes anovel technical idea because it is different from an i-typesemiconductor such as silicon added with an impurity.

Note that this embodiment shows a bottom-gate structure as the structureof the transistor 162; however, one embodiment of the present inventionis not limited to this. For example, the transistor 162 can have atop-gate structure. Alternatively, the transistor 162 can have adual-gate structure in which two gate electrode layers are providedabove and below a channel formation region with gate insulating layerstherebetween.

<Electrical Conduction Mechanism of Transistor Including OxideSemiconductor>

An electrical conduction mechanism of a transistor including an oxidesemiconductor will be described with reference to FIG. 24, FIGS. 25A and25B, FIGS. 26A and 26B, and FIG. 27. Note that the following descriptionis just a consideration and does not deny the validity of the invention.

FIG. 24 is a cross-sectional view of a dual-gate transistor (thin filmtransistor) including an oxide semiconductor. An oxide semiconductorlayer (OS) is provided over a gate electrode layer (GE1) with a gateinsulating layer (GI1) therebetween, and a source electrode (S) and adrain electrode (D) are formed thereover. Moreover, a gate insulatinglayer (GI2) is provided so as to cover the oxide semiconductor layer(OS), the source electrode (S), and the drain electrode (D). A gateelectrode (GE2) is provided over the oxide semiconductor layer (OS) withthe gate insulating layer (GI2) therebetween.

FIGS. 25A and 25B are energy band diagrams (schematic diagrams) of thecross section A-A′ in FIG. 24. FIG. 25A illustrates the case where thepotential difference between the source and the drain is zero (thesource and the drain have the same potential, V_(D)=0 V). FIG. 25Billustrates the case where the potential of the drain is higher thanthat of the source (V_(D)>0).

FIGS. 26A and 26B are energy band diagrams (schematic diagrams) of thecross section B-B′ in FIG. 24. FIG. 26A illustrates a state where apositive potential (+V_(G)) is applied to the gate (G1), that is, an onstate where carriers (electrons) flow between the source and the drain.FIG. 26B illustrates a state where a negative potential (−V_(G)) isapplied to the gate (G1), that is, an off state (a state where minoritycarriers do not flow).

FIG. 27 illustrates the relation between the vacuum level, the workfunction (φ_(M)) of a metal, and the electron affinity (χ) of an oxidesemiconductor.

A conventional oxide semiconductor is an n-type semiconductor. The Fermilevel (E_(f)) is distant from the intrinsic Fermi level (E_(i)) at thecenter of the band gap and is located near the conduction band. Notethat it is known that part of hydrogen in an oxide semiconductor servesas a donor, which is one of the factors that make the oxidesemiconductor an n-type semiconductor.

In contrast, the oxide semiconductor according to one embodiment of theinvention disclosed herein is an intrinsic (an i-type) or substantiallyintrinsic oxide semiconductor obtained in the following manner:hydrogen, which is a factor that makes an n-type semiconductor, isremoved from the oxide semiconductor for high purification so that theoxide semiconductor contains an element other than its main element(i.e., an impurity element) as little as possible. In other words, theoxide semiconductor according to one embodiment of the inventiondisclosed herein is a highly purified i-type (intrinsic) semiconductoror a substantially intrinsic semiconductor obtained by removingimpurities such as hydrogen and water as much as possible, not by addingan impurity element. Thus, the Fermi level (E_(f)) can be comparablewith the intrinsic Fermi level (E_(i)).

The electron affinity (χ) of the oxide semiconductor is said to be 4.3eV in the case where the band gap (E_(g)) is 3.15 eV. The work functionof titanium (Ti) included in the source electrode and the drainelectrode is substantially equal to the electron affinity (χ) of theoxide semiconductor. In this case, the Schottky barrier for electrons isnot formed at the interface between the metal and the oxidesemiconductor.

That is to say, in the case where the work function (φ_(M)) of the metalis equal to the electron affinity (χ) of the oxide semiconductor and themetal and the oxide semiconductor are in contact with each other, anenergy band diagram (a schematic diagram) illustrated in FIG. 25A isobtained.

In FIG. 25B, a black dot (•) indicates an electron. When a positivepotential is applied to the drain, the electron crosses over a barrier(h) and is injected into the oxide semiconductor, and flows toward thedrain. The height of the barrier (h) changes depending on the gatevoltage and drain voltage. When a positive drain voltage is applied, theheight of the barrier is smaller than that of the barrier in FIG. 25Awhere no voltage is applied, that is, smaller than ½ of the band gap(E_(g)).

At this time, as illustrated in FIG. 26A, the electron travels in thevicinity of the interface between the gate insulating layer and thehighly purified oxide semiconductor (the lowest part of the oxidesemiconductor, which is energetically stable).

As illustrated in FIG. 26B, when a negative potential is applied to thegate electrode (G1), a hole which is a minority carrier does not existsubstantially, so that the current value is substantially close to 0.

In such a manner, the oxide semiconductor layer becomes intrinsic (ani-type semiconductor) or substantially intrinsic by being highlypurified so as to contain an element other than its main element (i.e.,an impurity element) as little as possible. Thus, characteristics of theinterface between the oxide semiconductor and the gate insulating layerbecome obvious. For that reason, the gate insulating layer needs to forma favorable interface with the oxide semiconductor. Specifically, it ispreferable to use the following insulating layer, for example: aninsulating layer formed by a CVD method using high-density plasmagenerated with a power supply frequency in the range of the VHF band tothe microwave band, or an insulating layer formed by a sputteringmethod.

When the interface between the oxide semiconductor and the gateinsulating layer is made favorable while the oxide semiconductor ishighly purified, in the case where the transistor has a channel width Wof 1×10⁴ μm and a channel length L of 3 μm, for example, it is possibleto realize an off-state current of 1×10⁻¹³ A or less and a subthresholdswing (S value) of 0.1 V/dec at room temperature (with a 100-nm-thickgate insulating layer).

The oxide semiconductor is highly purified as described above so as tocontain an element other than its main element (i.e., an impurityelement) as little as possible, so that the thin film transistor canoperate in a favorable manner.

Modification Example

FIG. 6, FIGS. 7A and 7B, FIGS. 8A and 8B, and FIGS. 9A and 9B illustratemodification examples of structures of semiconductor devices. Thesemiconductor devices in each of which the transistor 162 has astructure different from that described above will be described below asmodification examples. That is, the structure of the transistor 160 isthe same as the above.

FIG. 6 illustrates an example of a semiconductor device including thetransistor 162 in which the gate electrode 136 d is placed below theoxide semiconductor layer 140 and the source/drain electrodes 142 a and142 b are in contact with a bottom surface of the oxide semiconductorlayer 140. Note that the planar structure can be changed as appropriateto correspond to the cross section; therefore, only the cross section isshown here.

A big difference between the structure in FIG. 6 and the structure inFIG. 2A is the position at which the oxide semiconductor layer 140 isconnected to the source/drain electrodes 142 a and 142 b. That is, a topsurface of the oxide semiconductor layer 140 is in contact with thesource/drain electrodes 142 a and 142 b in the structure in FIG. 2A,whereas the bottom surface of the oxide semiconductor layer 140 is incontact with the source/drain electrodes 142 a and 142 b in thestructure in FIG. 6. Moreover, the difference in the contact positionresults in a different arrangement of other electrodes, an insulatinglayer, and the like. The details of each component are the same as thoseof FIGS. 2A and 2B.

Specifically, the semiconductor device illustrated in FIG. 6 includesthe gate electrode 136 d provided over the interlayer insulating layer128, the gate insulating layer 138 provided over the gate electrode 136d, the source/drain electrodes 142 a and 142 b provided over the gateinsulating layer 138, and the oxide semiconductor layer 140 in contactwith top surfaces of the source/drain electrodes 142 a and 142 b.

Here, the gate electrode 136 d is provided so as to be embedded in theinsulating layer 132 formed over the interlayer insulating layer 128.Like the gate electrode 136 d, the electrode 136 a, the electrode 136 b,and the electrode 136 c are formed in contact with the source/drainelectrode 130 a, the source/drain electrode 130 b, and the electrode 130c, respectively.

The protective insulating layer 144 is provided over the transistor 162so as to be in contact with part of the oxide semiconductor layer 140.The interlayer insulating layer 146 is provided over the protectiveinsulating layer 144. Openings that reach the source/drain electrode 142a and the source/drain electrode 142 b are formed in the protectiveinsulating layer 144 and the interlayer insulating layer 146. Theelectrode 150 d and the electrode 150 e are formed in contact with thesource/drain electrode 142 a and the source/drain electrode 142 b,respectively, through the respective openings. Like the electrodes 150 dand 150 e, the electrodes 150 a, 150 b, and 150 c are formed in contactwith the electrodes 136 a, 136 b, and 136 c, respectively, throughopenings provided in the gate insulating layer 138, the protectiveinsulating layer 144, and the interlayer insulating layer 146.

The insulating layer 152 is provided over the interlayer insulatinglayer 146. The electrodes 154 a, 154 b, 154 c, and 154 d are provided soas to be embedded in the insulating layer 152. The electrode 154 a is incontact with the electrode 150 a. The electrode 154 b is in contact withthe electrode 150 b. The electrode 154 c is in contact with theelectrode 150 c and the electrode 150 d. The electrode 154 d is incontact with the electrode 150 e.

FIGS. 7A and 7B each illustrate an example of a structure of asemiconductor device in which the gate electrode 136 d is placed overthe oxide semiconductor layer 140. FIG. 7A illustrates an example of astructure in which the source/drain electrodes 142 a and 142 b are incontact with a bottom surface of the oxide semiconductor layer 140. FIG.7B illustrates an example of a structure in which the source/drainelectrodes 142 a and 142 b are in contact with a top surface of theoxide semiconductor layer 140.

A big difference between the structures in FIGS. 7A and 7B and those inFIG. 2A and FIG. 6 is that the gate electrode 136 d is placed over theoxide semiconductor layer 140. Furthermore, a big difference between thestructure in FIG. 7A and the structure in FIG. 7B is that thesource/drain electrodes 142 a and 142 b are in contact with either thebottom surface or the top surface of the oxide semiconductor layer 140.Moreover, these differences result in a different arrangement of otherelectrodes, an insulating layer, and the like. The details of eachcomponent are the same as those of FIGS. 2A and 2B, and the like.

Specifically, the semiconductor device illustrated in FIG. 7A includesthe source/drain electrodes 142 a and 142 b provided over the interlayerinsulating layer 128, the oxide semiconductor layer 140 in contact withtop surfaces of the source/drain electrodes 142 a and 142 b, the gateinsulating layer 138 provided over the oxide semiconductor layer 140,and the gate electrode 136 d over the gate insulating layer 138 in aregion overlapping with the oxide semiconductor layer 140.

The semiconductor device in FIG. 7B includes the oxide semiconductorlayer 140 provided over the interlayer insulating layer 128, thesource/drain electrodes 142 a and 142 b provided to be in contact with atop surface of the oxide semiconductor layer 140, the gate insulatinglayer 138 provided over the oxide semiconductor layer 140 and thesource/drain electrodes 142 a and 142 b, and the gate electrode 136 dover the gate insulating layer 138 in a region overlapping with theoxide semiconductor layer 140.

Note that in the structures in FIGS. 7A and 7B, a component (e.g., theelectrode 150 a or the electrode 154 a) is sometimes omitted from thestructure in FIGS. 2A and 2B or the like. In this case, a secondaryeffect such as simplification of a manufacturing process can beobtained. It is needless to say that a nonessential component can beomitted in the structures in FIGS. 2A and 2B and the like.

FIGS. 8A and 8B each illustrate an example of the case where the size ofthe element is relatively large and the gate electrode 136 d is placedbelow the oxide semiconductor layer 140. In this case, a demand for theplanarity of a surface and the coverage is relatively moderate, so thatit is not necessary to form a wiring, an electrode, and the like to beembedded in an insulating layer. For example, the gate electrode 136 dand the like can be formed by patterning after formation of a conductivelayer. Note that although not illustrated here, the transistor 160 canbe formed in a similar manner.

A big difference between the structure in FIG. 8A and the structure inFIG. 8B is that the source/drain electrodes 142 a and 142 b are incontact with either the bottom surface or the top surface of the oxidesemiconductor layer 140. Moreover, this difference results in otherelectrodes, an insulating layer, and the like being arranged in adifferent manner. The details of each component are the same as those ofFIGS. 2A and 2B, and the like.

Specifically, the semiconductor device in FIG. 8A includes the gateelectrode 136 d provided over the interlayer insulating layer 128, thegate insulating layer 138 provided over the gate electrode 136 d, thesource/drain electrodes 142 a and 142 b provided over the gateinsulating layer 138, and the oxide semiconductor layer 140 in contactwith top surfaces of the source/drain electrodes 142 a and 142 b.

The semiconductor device in FIG. 8B includes the gate electrode 136 dprovided over the interlayer insulating layer 128, the gate insulatinglayer 138 provided over the gate electrode 136 d, the oxidesemiconductor layer 140 provided over the gate insulating layer 138overlapping with the gate electrode 136 d, and the source/drainelectrodes 142 a and 142 b provided to be in contact with a top surfaceof the oxide semiconductor layer 140.

Note that also in the structures in FIGS. 8A and 8B, a component issometimes omitted from the structure in FIGS. 2A and 2B or the like.Also in this case, a secondary effect such as simplification of amanufacturing process can be obtained.

FIGS. 9A and 9B each illustrate an example of the case where the size ofthe element is relatively large and the gate electrode 136 d is placedover the oxide semiconductor layer 140. Also in this case, a demand forthe planarity of a surface and the coverage is relatively moderate, sothat it is not necessary to form a wiring, an electrode, and the like tobe embedded in an insulating layer. For example, the gate electrode 136d and the like can be formed by patterning after formation of aconductive layer. Note that although not illustrated here, thetransistor 160 can be formed in a similar manner.

A big difference between the structure in FIG. 9A and the structure inFIG. 9B is that the source/drain electrodes 142 a and 142 b are incontact with either the bottom surface or the top surface of the oxidesemiconductor layer 140. Moreover, this difference results in otherelectrodes, an insulating layer, and the like being arranged in adifferent manner. The details of each component are the same as those ofFIGS. 2A and 2B, and the like.

Specifically, the semiconductor device in FIG. 9A includes thesource/drain electrodes 142 a and 142 b provided over the interlayerinsulating layer 128, the oxide semiconductor layer 140 in contact withtop surfaces of the source/drain electrodes 142 a and 142 b, the gateinsulating layer 138 provided over the source/drain electrodes 142 a and142 b and the oxide semiconductor layer 140, and the gate electrode 136d provided over the gate insulating layer 138 in a region overlappingwith the oxide semiconductor layer 140.

The semiconductor device in FIG. 9B includes the oxide semiconductorlayer 140 provided over the interlayer insulating layer 128, thesource/drain electrodes 142 a and 142 b provided to be in contact with atop surface of the oxide semiconductor layer 140, the gate insulatinglayer 138 provided over the source/drain electrodes 142 a and 142 b andthe oxide semiconductor layer 140, and the gate electrode 136 d providedover the gate insulating layer 138 in a region overlapping with theoxide semiconductor layer 140.

Note that also in the structures in FIGS. 9A and 9B, a component issometimes omitted from the structure in FIGS. 2A and 2B or the like.Also in this case, a secondary effect such as simplification of amanufacturing process can be obtained.

As described above, a semiconductor device with a novel structure can berealized according to one embodiment of the invention disclosed herein.In this embodiment, the examples in each of which the semiconductordevice is formed by stacking the transistor 160 and the transistor 162are described; however, the structure of the semiconductor device is notlimited to this structure. Moreover, this embodiment shows the examplesin each of which the channel length direction of the transistor 160 isperpendicular to that of the transistor 162; however, the positionalrelation between the transistors 160 and 162 is not limited to thisexample. In addition, the transistor 160 and the transistor 162 may beprovided to overlap with each other.

In this embodiment, the semiconductor device with a minimum storage unit(one bit) is described for simplification; however, the structure of thesemiconductor device is not limited thereto. A more advancedsemiconductor device can be formed by connecting a plurality ofsemiconductor devices as appropriate. For example, a NAND-type orNOR-type semiconductor device can be formed by using a plurality of theabove-described semiconductor devices. The wiring configuration is notlimited to that in FIG. 1 and can be changed as appropriate.

The semiconductor device according to this embodiment can store data foran extremely long time because the transistor 162 has low off-statecurrent. That is, refresh operation which is necessary in a DRAM and thelike is not needed, so that power consumption can be suppressed.Moreover, the semiconductor device according to this embodiment can beused as a substantially non-volatile semiconductor device.

Since writing or the like of data is performed with switching operationof the transistor 162, high voltage is not necessary and deteriorationof the element does not become a problem. Furthermore, data is writtenand erased depending on on and off of the transistor, whereby high-speedoperation can be easily realized. In addition, it is also advantageousin that there is no need of operation for erasing data, which isnecessary in a flash memory and the like.

Since a transistor including a material other than an oxidesemiconductor can operate at sufficiently high speed, stored data can beread out at high speed by using the transistor.

The structures and methods described in this embodiment can be combinedas appropriate with any of the structures and methods described in theother embodiments.

Embodiment 2

In this embodiment, a circuit configuration and operation of a storageelement in a semiconductor device according to one embodiment of thepresent invention will be described.

FIG. 10 illustrates an example of a circuit diagram of a storage element(hereinafter also referred to as a memory cell) included in asemiconductor device. A memory cell 200 illustrated in FIG. 10 includesa first wiring SL (a source line), a second wiring BL (a bit line), athird wiring S1 (a first signal line), a fourth wiring S2 (a secondsignal line), a fifth wiring WL (a word line), a transistor 201 (a firsttransistor), a transistor 202 (a second transistor), and a transistor203 (a third transistor). The transistors 201 and 203 are formed using amaterial other than an oxide semiconductor. The transistor 202 is formedusing an oxide semiconductor.

A gate electrode of the transistor 201 and one of a source electrode anda drain electrode of the transistor 202 are electrically connected toeach other. The first wiring and a source electrode of the transistor201 are electrically connected to each other. A drain electrode of thetransistor 201 and a source electrode of the transistor 203 areelectrically connected to each other. The second wiring and a drainelectrode of the transistor 203 are electrically connected to eachother. The third wiring and the other of the source electrode and thedrain electrode of the transistor 202 are electrically connected to eachother. The fourth wiring and a gate electrode of the transistor 202 areelectrically connected to each other. The fifth wiring and a gateelectrode of the transistor 203 are electrically connected to eachother.

Next, operation of the circuit will be specifically described.

When data is written into the memory cell 200, the first wiring, thefifth wiring, and the second wiring are set to 0 V and the fourth wiringis set to 2 V. The third wiring is set to 2 V in order to write data “1”and set to 0 V in order to write data “0”. At this time, the transistor203 is turned off and the transistor 202 is turned on. Note that at theend of the writing, before the potential of the third wiring is changed,the fourth wiring is set to 0 V so that the transistor 202 is turnedoff.

As a result, a potential of a node (hereinafter referred to as a node A)connected to the gate electrode of the transistor 201 is set toapproximately 2 V after the writing of the data “1” and set toapproximately 0 V after the writing of the data “0”. Electric chargecorresponding to the potential of the third wiring is stored at the nodeA; since the off-state current of the transistor 202 is extremely low orsubstantially 0, the potential of the gate electrode of the transistor201 is held for a ling time. FIG. 11 illustrates an example of a timingchart of writing operation.

Then, when data is read from the memory cell, the first wiring, thefourth wiring, and the third wiring are set to 0 V; the fifth wiring isset to 2 V; and a reading circuit connected to the second wiring is setto an operation state. At this time, the transistor 203 is turned on andthe transistor 202 is turned off.

The transistor 201 is off when the data “0” has been written, that is,the node A is set to approximately 0 V, so that the resistance betweenthe second wiring and the first wiring is high. On the other hand, thetransistor 201 is on when the data “1” has been written, that is, thenode A is set to approximately 2 V, so that the resistance between thesecond wiring and the first wiring is low. The reading circuit can readdata “0” or data “1” from the difference of the resistance state of thememory cell. Note that the second wiring at the time of the writing isset to 0 V; alternatively, it may be in a floating state or may becharged to have a potential higher than 0 V. The third wiring at thetime of the reading is set to 0 V; alternatively, it may be in afloating state or may be charged to have a potential higher than 0 V.

Note that data “1” and data “0” are defined for convenience and may bereversed. Moreover, the above-described operation voltages are oneexample. The operation voltages are set so that the transistor 201 isturned off in the case of data “0” and turned on in the case of data“1”, the transistor 202 is turned on at the time of writing and turnedoff in periods except the time of writing, and the transistor 203 isturned on at the time of reading. In particular, a power supplypotential VDD of a peripheral logic circuit may be used instead of 2 V.

FIG. 12 is a block circuit diagram of a semiconductor device with astorage capacity of (m×n) bits according to one embodiment of thepresent invention.

The semiconductor device according to one embodiment of the presentinvention includes m fourth wirings, m fifth wirings, n second wirings,n third wirings, a memory cell array 210 in which a plurality of memorycells 200(1,1) to 200(m,n) are arranged in a matrix of m rows by ncolumns (m and n are each a natural number), and peripheral circuitssuch as a circuit 211 for driving the second wirings and the thirdwirings, a circuit 213 for driving the fourth wirings and the fifthwirings, and a reading circuit 212. As another peripheral circuit, arefresh circuit or the like may be provided.

The memory cell 200(i,j) is considered as a typical example of thememory cells. Here, the memory cell 200(i,j) (i is an integer of 1 to mand j is an integer of 1 to n) is connected to the second wiring BL(j),the third wiring S1(j), the fifth wiring WL(i), the fourth wiring S2(i),and the first wiring. A first wiring potential Vs is supplied to thefirst wiring. The second wirings BL(1) to BL(n) and the third wiringsS1(1) to S1(n) are connected to the circuit 211 for driving the secondwirings and the third wirings and the reading circuit 212. The fifthwirings WL(1) to WL(m) and the fourth wirings S2(1) to S2(m) areconnected to the circuit 213 for driving the fourth wirings and thefifth wirings.

Operation of the semiconductor device illustrated in FIG. 12 will bedescribed. In this structure, data is written and read per row.

When data is written into the memory cells 200(i,1) to 200(i,n) of thei-th row, the first wiring potential Vs is set to 0 V; the fifth wiringWL(i) and the second wirings BL(1) to BL(n) are set to 0 V; and thefourth wiring S2(i) is set to 2 V. At this time, the transistor 202 isturned on. Among the third wirings S1(1) to S1(n), a column in whichdata “1” is to be written is set to 2 V and a column in which data “0”is to be written is set to 0 V. Note that at the end of the writing,before the potentials of the third wirings S1(1) to S1(n) are changed,the fourth wiring S2(i) is set to 0 V so that the transistor 202 isturned off. Moreover, a non-selected fifth wiring and a non-selectedfourth wiring are set to 0 V.

As a result, the potential of the node (referred to as the node A)connected to the gate electrode of the transistor 201 in a memory cellto which data “1” has been written is set to approximately 2 V, and thepotential of the node A in a memory cell to which data “0” has beenwritten is set to approximately 0 V. The potential of the node A in anon-selected memory cell is not changed.

When data is read from the memory cells 200(i,1) to 200(i,n) of the i-throw, the first wiring potential Vs is set to 0 V; the fifth wiring WL(i)is set to 2 V; the fourth wiring S2(i) and the third wirings S1(1) toS1(n) are set to 0 V; and the reading circuit connected to the secondwirings BL(1) to BL(n) is set to an operation state. The reading circuitcan read data “0” or data “1” from the difference of the resistancestate of the memory cell, for example. Note that a non-selected fifthwiring and a non-selected fourth wiring are set to 0 V. Note that thesecond wiring at the time of the writing is set to 0 V; alternatively,it may be in a floating state or may be charged to have a potentialhigher than 0 V. The third wiring at the time of the reading is set to 0V; alternatively, it may be in a floating state or may be charged tohave a potential higher than 0 V.

Note that data “1” and data “0” are defined for convenience and may bereversed. Moreover, the above-described operation voltages are oneexample. The operation voltages are set so that the transistor 201 isturned off in the case of data “0” and turned on in the case of data“1”, the transistor 202 is turned on at the time of writing and turnedoff in periods except the time of writing, and the transistor 203 isturned on at the time of reading. In particular, the power supplypotential VDD of a peripheral logic circuit may be used instead of 2 V.

Next, another example of a circuit configuration and operation of thestorage element according to one embodiment of the present inventionwill be described.

FIG. 13 illustrates an example of a memory cell circuit included in asemiconductor device. A memory cell 220 illustrated in FIG. 13 includesthe first wiring SL, the second wiring BL, the third wiring S1, thefourth wiring S2, the fifth wiring WL, the transistor 201 (the firsttransistor), the transistor 202 (the second transistor), and thetransistor 203 (the third transistor). The transistors 201 and 203 areformed using a material other than an oxide semiconductor. Thetransistor 202 is formed using an oxide semiconductor.

In the circuit of the memory cell 220 in FIG. 13, the directions of thethird wiring and the fourth wiring are different from those in thecircuit of the memory cell 200 in FIG. 10. In other words, in thecircuit of the memory cell 220 in FIG. 13, the third wiring is placed inthe direction of the fifth wiring (in the row direction) and the fourthwiring is placed in the direction of the second wiring (in the columndirection).

A gate electrode of the transistor 201 and one of a source electrode anda drain electrode of the transistor 202 are electrically connected toeach other. The first wiring and a source electrode of the transistor201 are electrically connected to each other. A drain electrode of thetransistor 201 and a source electrode of the transistor 203 areelectrically connected to each other. The second wiring and a drainelectrode of the transistor 203 are electrically connected to eachother. The third wiring and the other of the source electrode and thedrain electrode of the transistor 202 are electrically connected to eachother. The fourth wiring and a gate electrode of the transistor 202 areelectrically connected to each other. The fifth wiring and a gateelectrode of the transistor 203 are electrically connected to eachother.

The circuit operation of the memory cell 220 in FIG. 13 is similar tothat of the memory cell 200 in FIG. 10; therefore, the detaileddescription is not repeated.

FIG. 14 is a block circuit diagram of a semiconductor device with astorage capacity of (m×n) bits according to one embodiment of thepresent invention.

The semiconductor device according to one embodiment of the presentinvention includes m third wirings, m fifth wirings, n second wirings, nfourth wirings, a memory cell array 230 in which a plurality of memorycells 220(1,1) to 220(m,n) are arranged in a matrix of m rows by ncolumns (m and n are each a natural number), and peripheral circuitssuch as a circuit 231 for driving the second wirings and the fourthwirings, a circuit 233 for driving the third wirings and the fifthwirings, and a reading circuit 232. As another peripheral circuit, arefresh circuit or the like may be provided.

In the semiconductor device in FIG. 14, the directions of the thirdwiring and the fourth wiring are different from those in thesemiconductor device in FIG. 12. In other words, in the semiconductordevice in FIG. 14, the third wiring is placed in the direction of thefifth wiring (in the row direction) and the fourth wiring is placed inthe direction of the second wiring (in the column direction).

The memory cell 220(i,j) is considered as a typical example of thememory cells. Here, the memory cell 220(i,j) (i is an integer of 1 to mand j is an integer of 1 to n) is connected to the second wiring BL(j),the fourth wiring S2(j), the fifth wiring WL(i), the third wiring S1(i),and the first wiring. The first wiring potential Vs is supplied to thefirst wiring. The second wirings BL(1) to BL(n) and the fourth wiringsS2(1) to S2(n) are connected to the circuit 231 for driving the secondwirings and the fourth wirings and the reading circuit 232. The fifthwirings WL(1) to WL(m) and the third wirings S1(1) to S1(m) areconnected to the circuit 233 for driving the third wirings and the fifthwirings.

Operation of the semiconductor device illustrated in FIG. 14 will bedescribed. In this structure, data is written per column and read perrow.

When data is written into the memory cells 220(1,j) to 220(m,j) of thej-th column, the first wiring potential Vs is set to 0 V; the fifthwirings WL(1) to WL(m) and the second wiring BL(j) are set to 0 V; andthe fourth wiring S2(j) is set to 2 V. Among the third wirings S1(1) toS1(m), a row in which data “1” is to be written is set to 2 V and a rowin which data “0” is to be written is set to 0 V. Note that at the endof the writing, before the potentials of the third wirings S1(1) toS1(m) are changed, the fourth wiring S2(j) is set to 0 V so that thetransistor 202 is turned off. Moreover, a non-selected second wiring anda non-selected fourth wiring are set to 0 V.

As a result, the potential of the node (referred to as the node A)connected to the gate electrode of the transistor 201 in a memory cellto which data “1” has been written is set to approximately 2 V, and thepotential of the node A in a memory cell to which data “0” has beenwritten is set to approximately 0 V. The potential of the node A in anon-selected memory cell is not changed.

When data is read from the memory cells 200(i,1) to 200(i,n) of the i-throw, the first wiring is set to 0 V; the fifth wiring WL(i) is set to 2V; the fourth wirings S2(1) to S2(n) and the third wiring S1(i) are setto 0 V; and the reading circuit connected to the second wirings BL(1) toBL(n) is set to an operation state. The reading circuit can read data“0” or data “1” from the difference of the resistance state of thememory cell, for example. Note that a non-selected fifth wiring and anon-selected third wiring are set to 0 V. Note that the second wiring atthe time of the writing is set to 0 V; alternatively, it may be in afloating state or may be charged to have a potential higher than 0 V.The third wiring at the time of the reading is set to 0 V;alternatively, it may be in a floating state or may be charged to have apotential higher than 0 V.

Note that data “1” and data “0” are defined for convenience and may bereversed. Moreover, the above-described operation voltages are oneexample. The operation voltages are set so that the transistor 201 isturned off in the case of data “0” and turned on in the case of data“1”, the transistor 202 is turned on at the time of writing and turnedoff in periods except the time of writing, and the transistor 203 isturned on at the time of reading. In particular, the power supplypotential VDD of a peripheral logic circuit may be used instead of 2 V.

Since the off-state current of a transistor including an oxidesemiconductor is extremely low, stored data can be retained for anextremely long time by using the transistor. In other words, powerconsumption can be adequately reduced because refresh operation becomesunnecessary or the frequency of refresh operation can be extremely low.Moreover, stored data can be retained for a long time even when power isnot supplied.

Further, high voltage is not needed to write data, and deterioration ofthe element does not become a problem. Furthermore, data is writtendepending on the on state and the off state of the transistor, wherebyhigh-speed operation can be easily realized. In addition, there is noneed of operation for erasing data, which is necessary in a flash memoryand the like.

Since a transistor including a material other than an oxidesemiconductor can operate at sufficiently high speed, stored data can beread out at high speed by using the transistor.

Embodiment 3

In this embodiment, an example of a circuit configuration and operationof a storage element that is different from those in Embodiment 2 willbe described.

FIG. 15 illustrates an example of a circuit diagram of a memory cellincluded in a semiconductor device. A memory cell 240 illustrated inFIG. 15 includes the first wiring SL, the second wiring BL, the thirdwiring S1, the fourth wiring S2, the fifth wiring WL, the transistor 201(the first transistor), the transistor 202 (the second transistor), anda capacitor 204. The transistor 201 is formed using a material otherthan an oxide semiconductor. The transistor 202 is formed using an oxidesemiconductor.

A gate electrode of the transistor 201, one of a source electrode and adrain electrode of the transistor 202, and one of electrodes of thecapacitor 204 are electrically connected to each other. The first wiringand a source electrode of the transistor 201 are electrically connectedto each other. The second wiring and a drain electrode of the transistor201 are electrically connected to each other. The third wiring and theother of the source electrode and the drain electrode of the transistor202 are electrically connected to each other. The fourth wiring and agate electrode of the transistor 202 are electrically connected to eachother. The fifth wiring and the other of the electrodes of the capacitor204 are electrically connected to each other.

Next, operation of the circuit will be specifically described.

When data is written into the memory cell 240, the first wiring, thefifth wiring, and the second wiring are set to 0 V and the fourth wiringis set to 2 V. The third wiring is set to 2 V in order to write data “1”and set to 0 V in order to write data “0”. At this time, the transistor202 is turned on. Note that at the end of the writing, before thepotential of the third wiring is changed, the fourth wiring is set to 0V so that the transistor 202 is turned off.

As a result, the potential of the node (referred to as the node A)connected to the gate electrode of the transistor 201 is set toapproximately 2 V after the writing of the data “1” and set toapproximately 0 V after the writing of the data “0”.

When data is read from the memory cell 240, the first wiring, the fourthwiring, and the third wiring are set to 0 V; the fifth wiring is set to2 V; and a reading circuit connected to the second wiring is set to anoperation state. At this time, the transistor 202 is turned off.

The state of the transistor 201 in the case where the fifth wiring isset to 2 V will be described. The potential of the node A, whichdetermines the state of the transistor 201, depends on a capacitance C1between the fifth wiring and the node A and a capacitance C2 between thegate and the source and drain of the transistor 201.

FIG. 16 illustrates a relation between the potential of the fifth wiringand the potential of the node A. Here, as an example, C1/C2>>1 issatisfied when the transistor 201 is off and C1/C2=1 is satisfied whenthe transistor 201 is on. The threshold voltage of the transistor 201 is2.5 V. Under the condition where the fifth wiring is set to 2 V as inthe graph illustrated in FIG. 16, the node A is set to approximately 2 Vin the case where data “0” has been written, and the transistor 201 isoff. On the other hand, the node A is set to approximately 3.25 V in thecase where data “1” has been written, and the transistor 201 is on. Thememory cell has a low resistance when the transistor 201 is on and has ahigh resistance when the transistor 201 is off. Therefore, the readingcircuit can read data “0” or data “1” from the difference of theresistance state of the memory cell. Note that when data is not readout, that is, when the potential of the fifth wiring is 0 V, the node Ais set to approximately 0 V in the case where data “0” has been writtenand set to approximately 2 V in the case where data “1” has beenwritten, and the transistor 201 is off in both of the cases.

Note that the third wiring at the time of the reading is set to 0 V;alternatively, it may be in a floating state or may be charged to have apotential higher than 0 V. Data “1” and data “0” are defined forconvenience and may be reversed.

The above-described operation voltages are one example. The potential ofthe third wiring at the time of writing can be selected from thepotentials of data “0” and data “1” as long as the transistor 202 isturned off after the writing and the transistor 201 is off in the casewhere the potential of the fifth wiring is set to 0 V. The potential ofthe fifth wiring at the time of reading can be selected so that thetransistor 201 is turned off in the case where data “0” has been writtenand is turned on in the case where data “1” has been written.Furthermore, the above-described threshold voltage of the transistor 201is an example. The transistor 201 can have any threshold voltage as longas the above state of the transistor 201 is not changed.

A semiconductor device illustrated in FIG. 17 according to oneembodiment of the present invention includes m fourth wirings, m fifthwirings, n second wirings, n third wirings, a memory cell array 250 inwhich a plurality of memory cells 240(1,1) to 240(m,n) are arranged in amatrix of m rows by n columns (m and n are each a natural number), andperipheral circuits such as the circuit 211 for driving the secondwirings and the third wirings, the circuit 213 for driving the fourthwirings and the fifth wirings, and the reading circuit 212. As anotherperipheral circuit, a refresh circuit or the like may be provided.

The memory cell 240(i,j) is considered as a typical example of thememory cells. Here, the memory cell 240(i,j) (i is an integer of 1 to mand j is an integer of 1 to n) is connected to the second wiring BL(j),the third wiring S1(j), the fifth wiring WL(i), the fourth wiring S2(i),and the first wiring. The first wiring potential Vs is supplied to thefirst wiring. The second wirings BL(1) to BL(n) and the third wiringsS1(1) to S1(n) are connected to the circuit 211 for driving the secondwirings and the third wirings and the reading circuit 212. The fifthwirings WL(1) to WL(m) and the fourth wirings S2(1) to S2(m) areconnected to the circuit 213 for driving the fourth wirings and thefifth wirings.

Operation of the semiconductor device illustrated in FIG. 17 will bedescribed. In this structure, data is written and read per row.

When data is written into the memory cells 240(i,1) to 240(i,n) of thei-th row, the first wiring potential Vs is set to 0 V; the fifth wiringWL(i) and the second wirings BL(1) to BL(n) are set to 0 V; and thefourth wiring S2(i) is set to 2 V. At this time, the transistor 202 isturned on. Among the third wirings S1(1) to S1(n), a column in whichdata “1” is to be written is set to 2 V and a column in which data “0”is to be written is set to 0 V. Note that at the end of the writing,before the potentials of the third wirings S1(1) to S1(n) are changed,the fourth wiring S2(i) is set to 0 V so that the transistor 202 isturned off. Moreover, a non-selected fifth wiring and a non-selectedfourth wiring are set to 0 V.

As a result, the potential of the node (referred to as the node A)connected to the gate electrode of the transistor 201 in a memory cellto which data “1” has been written is set to approximately 2 V, and thepotential of the node A after data “0” is written is set toapproximately 0 V. The potential of the node A in a non-selected memorycell is not changed.

When data is read from the memory cells 240(i,1) to 240(i,n) of the i-throw, the first wiring potential Vs is set to 0 V; the fifth wiring WL(i)is set to 2 V; the fourth wiring S2(i) and the third wirings S1(1) toS1(n) are set to 0 V; and the reading circuit connected to the secondwirings BL(1) to BL(n) is set to an operation state. At this time, thetransistor 202 is turned off. Note that a non-selected fifth wiring anda non-selected fourth wiring are set to 0 V.

The state of the transistor 201 at the time of reading will bedescribed. Assuming that C1/C2>>1 is satisfied when the transistor 201is off and C1/C2=1 is satisfied when the transistor 201 is on as hasbeen described, the relation between the potential of the fifth wiringand the potential of the node A is represented by FIG. 16. The thresholdvoltage of the transistor 201 is 2.5 V. In non-selected memory cells,the potential of the fifth wiring is set to 0 V. Thus, the node A in amemory cell having data “0” is set to approximately 0 V and the node Ain a memory cell having data “1” is set to approximately 2 V, and thetransistor 201 is off in both of the cases. In the memory cells of thei-th row, the potential of the fifth wiring is set to 2 V. Thus, thenode A in a memory cell having data “0” is set to approximately 2 V andthe transistor 201 is off, whereas the node A in a memory cell havingdata “1” is set to approximately 3.25 V and the transistor 201 is on.The memory cell has a low resistance when the transistor 201 is on andhas a high resistance when the transistor 201 is off. As a result, onlya memory cell having data “0” has a low resistance among the memorycells of the i-th row. The reading circuit can read data “0” or data “1”depending on the difference of load resistance connected to the secondwiring.

Note that the third wiring at the time of the reading is set to 0 V;alternatively, it may be in a floating state or may be charged to have apotential higher than 0 V. Data “1” and data “0” are defined forconvenience and may be reversed.

The above-described operation voltages are one example. The potential ofthe third wiring at the time of writing can be selected from thepotentials of data “0” and data “1” as long as the transistor 202 isturned off after the writing and the transistor 201 is off in the casewhere the potential of the fifth wiring is set to 0 V. The potential ofthe fifth wiring at the time of reading can be selected so that thetransistor 201 is turned off in the case where data “0” has been writtenand is turned on in the case where data “1” has been written.Furthermore, the above-described threshold voltage of the transistor 201is an example. The transistor 201 can have any threshold voltage as longas the above state of the transistor 201 is not changed.

Since the off-state current of a transistor including an oxidesemiconductor is extremely low, stored data can be retained for anextremely long time by using the transistor. In other words, powerconsumption can be adequately reduced because refresh operation becomesunnecessary or the frequency of refresh operation can be extremely low.Moreover, stored data can be retained for a long time even when power isnot supplied.

Further, high voltage is not needed to write data, and deterioration ofthe element does not become a problem. Furthermore, data is writtendepending on the on state and the off state of the transistor, wherebyhigh-speed operation can be easily realized. In addition, there is noneed of operation for erasing data, which is necessary in a flash memoryand the like.

Since a transistor including a material other than an oxidesemiconductor can operate at sufficiently high speed, stored data can beread out at high speed by using the transistor.

Next, another example of a circuit configuration and operation of thestorage element according to one embodiment of the present inventionwill be described.

FIG. 18 illustrates an example of a memory cell circuit included in asemiconductor device. A memory cell 260 illustrated in FIG. 18 includesthe first wiring SL, the second wiring BL, the third wiring S1, thefourth wiring S2, the fifth wiring WL, the transistor 201, thetransistor 202, and the capacitor 204. The transistor 201 is formedusing a material other than an oxide semiconductor. The transistor 202is formed using an oxide semiconductor.

In the circuit of the memory cell 260 in FIG. 18, the directions of thethird wiring and the fourth wiring are different from those in thecircuit of the memory cell 240 in FIG. 15. That is, in the memory cell260 in FIG. 18, the third wiring is placed in the direction of the fifthwiring (in the row direction) and the fourth wiring is placed in thedirection of the second wiring (in the column direction).

A gate electrode of the transistor 201, one of a source electrode and adrain electrode of the transistor 202, and one electrode of thecapacitor 204 are electrically connected to each other. The first wiringand a source electrode of the transistor 201 are electrically connectedto each other. The second wiring and a drain electrode of the transistor201 are electrically connected to each other. The third wiring and theother of the source electrode and the drain electrode of the transistor202 are electrically connected to each other. The fourth wiring and agate electrode of the transistor 202 are electrically connected to eachother. The fifth wiring and the other electrode of the capacitor 204 areelectrically connected to each other.

The circuit operation of the memory cell 260 in FIG. 18 is similar tothat of the memory cell 240 in FIG. 15; therefore, the detaileddescription is not repeated.

FIG. 19 is a block circuit diagram of a semiconductor device with astorage capacity of (m×n) bits according to one embodiment of thepresent invention.

The semiconductor device according to one embodiment of the presentinvention includes m third wirings, m fifth wirings, n second wirings, nfourth wirings, a memory cell array 270 in which a plurality of memorycells 260(1,1) to 260(m,n) are arranged in a matrix of m rows by ncolumns (m and n are each a natural number), and peripheral circuitssuch as the circuit 231 for driving the second wirings and the fourthwirings, the circuit 233 for driving the third wirings and the fifthwirings, and the reading circuit 232. As another peripheral circuit, arefresh circuit or the like may be provided.

In the semiconductor device in FIG. 19, the directions of the thirdwiring and the fourth wiring are different from those in thesemiconductor device in FIG. 17. That is, in the semiconductor device inFIG. 19, the third wiring is placed in the direction of the fifth wiring(in the row direction) and the fourth wiring is placed in the directionof the second wiring (in the column direction).

The memory cell 260(i,j) is considered as a typical example of thememory cells. Here, the memory cell 260(i,j) (i is an integer of 1 to mand j is an integer of 1 to n) is connected to the second wiring BL(j),the fourth wiring S2(j), the fifth wiring WL(i), the third wiring S1(i),and the first wiring. The first wiring potential Vs is supplied to thefirst wiring. The second wirings BL(1) to BL(n) and the fourth wiringsS2(1) to S2(n) are connected to the circuit 231 for driving the secondwirings and the fourth wirings and the reading circuit 232. The fifthwirings WL(1) to WL(m) and the third wirings S1(1) to S1(m) areconnected to the circuit 233 for driving the third wirings and the fifthwirings.

The operation of the semiconductor device in FIG. 19 is similar to thatof the semiconductor device in FIG. 17; therefore, the detaileddescription is not repeated.

Since the off-state current of a transistor including an oxidesemiconductor is extremely low, stored data can be retained for anextremely long time by using the transistor. In other words, powerconsumption can be adequately reduced because refresh operation becomesunnecessary or the frequency of refresh operation can be extremely low.Moreover, stored data can be retained for a long time even when power isnot supplied.

High voltage is not needed to write data, and deterioration of theelement does not become a problem. Furthermore, data is writtendepending on the on state and the off state of the transistor, wherebyhigh-speed operation can be easily realized. In addition, there is noneed of operation for erasing data, which is necessary in a flash memoryand the like.

Since a transistor including a material other than an oxidesemiconductor can operate at sufficiently high speed, stored data can beread out at high speed by using the transistor.

Embodiment 4

In this embodiment, an example of a circuit configuration and operationof a storage element that is different from those in Embodiments 2 and 3will be described.

FIGS. 20A and 20B each illustrate an example of a circuit diagram of amemory cell included in a semiconductor device. In a memory cell 280 aillustrated in FIG. 20A and a memory cell 280 b illustrated in FIG. 20B,the first transistor and the third transistor that are connected inseries are replaced with each other, as compared to those in the memorycell 200 in FIG. 10 and the memory cell 220 in FIG. 13, respectively.

In the memory cell 280 a in FIG. 20A, a gate electrode of the transistor201 and one of a source electrode and a drain electrode of thetransistor 202 are electrically connected to each other. The firstwiring and a source electrode of the transistor 203 are electricallyconnected to each other. A drain electrode of the transistor 203 and asource electrode of the transistor 201 are electrically connected toeach other. The second wiring and a drain electrode of the transistor201 are electrically connected to each other. The third wiring and theother of the source electrode and the drain electrode of the transistor202 are electrically connected to each other. The fourth wiring and agate electrode of the transistor 202 are electrically connected to eachother. The fifth wiring and a gate electrode of the transistor 203 areelectrically connected to each other.

In the memory cell 280 b in FIG. 20B, the directions of the third wiringand the fourth wiring are different from those in the memory cellcircuit in FIG. 20A. In other words, in the memory cell circuit in FIG.20B, the fourth wiring is placed in the direction of the second wiring(in the column direction) and the third wiring is placed in thedirection of the fifth wiring (in the row direction).

The circuit operations of the memory cell 280 a in FIG. 20A and thememory cell 280 b in FIG. 20B are similar to those of the memory cell200 in FIG. 10 and the memory cell 220 in FIG. 13, respectively;therefore, the detailed description is not repeated.

Embodiment 5

In this embodiment, an example of a circuit configuration and operationof a storage element that is different from those in Embodiments 2 to 4will be described.

FIG. 21 illustrates an example of a circuit diagram of a memory cellincluded in a semiconductor device. A circuit of a memory cell 290 inFIG. 21 additionally includes a capacitor between the node A and thefirst wiring as compared to the memory cell 200 in FIG. 10.

The memory cell 290 illustrated in FIG. 21 includes the first wiring SL,the second wiring BL, the third wiring S1, the fourth wiring S2, thefifth wiring WL, the transistor 201, the transistor 202, the transistor203, and a capacitor 205. The transistors 201 and 203 are formed using amaterial other than an oxide semiconductor. The transistor 202 is formedusing an oxide semiconductor.

A gate electrode of the transistor 201, one of a source electrode and adrain electrode of the transistor 202, and one electrode of thecapacitor 205 are electrically connected to each other. The firstwiring, a source electrode of the transistor 201, and the otherelectrode of the capacitor 205 are electrically connected to each other.A drain electrode of the transistor 201 and a source electrode of thetransistor 203 are electrically connected to each other. The secondwiring and a drain electrode of the transistor 203 are electricallyconnected to each other. The third wiring and the other of the sourceelectrode and the drain electrode of the transistor 202 are electricallyconnected to each other. The fourth wiring and a gate electrode of thetransistor 202 are electrically connected to each other. The fifthwiring and a gate electrode of the transistor 203 are electricallyconnected to each other.

The operation of the memory cell circuit in FIG. 21 is similar to thatof the memory cell circuit in FIG. 10; therefore, the detaileddescription is not repeated. When the memory cell includes the capacitor205, data retention characteristics are improved.

Embodiment 6

An example of a reading circuit included in a semiconductor deviceaccording to one embodiment of the present invention will be describedwith reference to FIG. 22.

A reading circuit illustrated in FIG. 22 includes a transistor 206 and adifferential amplifier 207.

At the time of reading, a terminal A is connected to a second wiringconnected to a memory cell from which data is read. Moreover, a biasvoltage Vbias is applied to a gate electrode of the transistor 206, anda predetermined current flows through the transistor 206.

A memory cell has a different resistance corresponding to data “1” ordata “0” stored therein. Specifically, when the transistor 201 in aselected memory cell is on, the memory cell has a low resistance;whereas when the transistor 201 in a selected memory cell is off, thememory cell has a high resistance.

When the memory cell has a high resistance, the potential of theterminal A is higher than a reference potential Vref and data “1” isoutput from an output of the differential amplifier. On the other hand,when the memory cell has a low resistance, the potential of the terminalA is lower than the reference potential Vref and data “0” is output fromthe output of the differential amplifier.

In such a manner, the reading circuit can read data from the memorycell. Note that the reading circuit in this embodiment is an example,and a known circuit may be used. For example, the reading circuit mayinclude a precharge circuit. A second wiring for reference may beconnected instead of the reference potential Vref. A latch senseamplifier may be used instead of the differential amplifier.

Embodiment 7

In this embodiment, examples of electronic devices each including thesemiconductor device according to any of the above-described embodimentswill be described with reference to FIGS. 23A to 23F. The semiconductordevice according to the above embodiment can retain data even when poweris not supplied. Moreover, degradation due to writing or erasing doesnot occur. Furthermore, the semiconductor device can operate at highspeed. For these reasons, an electronic device with a novel structurecan be provided by using the semiconductor device. Note that thesemiconductor devices according to the above embodiment are integratedand mounted on a circuit board or the like, and placed inside anelectronic device.

FIG. 23A illustrates a notebook personal computer including thesemiconductor device according to the above embodiment. The notebookpersonal computer includes a main body 301, a housing 302, a displayportion 303, a keyboard 304, and the like. The semiconductor deviceaccording to one embodiment of the present invention is applied to anotebook personal computer, whereby the notebook personal computer canhold data even when power is not supplied. Moreover, degradation due towriting or erasing does not occur. Further, the notebook personalcomputer can operate at high speed. For these reasons, it is preferableto apply the semiconductor device according to one embodiment of thepresent invention to a notebook personal computer.

FIG. 23B illustrates a personal digital assistant (PDA) including thesemiconductor device according to the above embodiment. A main body 311is provided with a display portion 313, an external interface 315,operation buttons 314, and the like. A stylus 312 that is an accessoryis used for operating the PDA. The semiconductor device according to oneembodiment of the present invention is applied to a PDA, whereby the PDAcan hold data even when power is not supplied. Moreover, degradation dueto writing or erasing does not occur. Further, the PDA can operate athigh speed. For these reasons, it is preferable to apply thesemiconductor device according to one embodiment of the presentinvention to a PDA.

FIG. 23C illustrates an e-book reader 320 as an example of electronicpaper including the semiconductor device according to the aboveembodiment. The e-book reader 320 includes two housings: a housing 321and a housing 323. The housing 321 and the housing 323 are combined witha hinge 337 so that the e-book reader 320 can be opened and closed withthe hinge 337 as an axis. With such a structure, the e-book reader 320can be used like a paper book. The semiconductor device according to oneembodiment of the present invention is applied to electronic paper,whereby the electronic paper can hold data even when power is notsupplied. Moreover, degradation due to writing or erasing does notoccur. Further, the electronic paper can operate at high speed. Forthese reasons, it is preferable to apply the semiconductor deviceaccording to one embodiment of the present invention to electronicpaper.

A display portion 325 is incorporated in the housing 321 and a displayportion 327 is incorporated in the housing 323. The display portion 325and the display portion 327 may display one image or different images.When the display portion 325 and the display portion 327 displaydifferent images, for example, the right display portion (the displayportion 325 in FIG. 23C) can display text and the left display portion(the display portion 327 in FIG. 23C) can display images.

FIG. 23C illustrates an example in which the housing 321 is providedwith an operation portion and the like. For example, the housing 321 isprovided with a power switch 331, operation keys 333, a speaker 335, andthe like. Pages can be turned with the operation key 333. Note that akeyboard, a pointing device, or the like may also be provided on thesurface of the housing, on which the display portion is provided.Furthermore, an external connection terminal (e.g., an earphoneterminal, a USB terminal, or a terminal that can be connected to variouscables such as an AC adapter and a USB cable), a recording mediuminsertion portion, and the like may be provided on the back surface orthe side surface of the housing. Further, the e-book reader 320 may havea function of an electronic dictionary.

The e-book reader 320 may send and receive data wirelessly. Throughwireless communication, desired book data or the like can be purchasedand downloaded from an electronic book server.

Note that electronic paper can be applied to devices in a variety offields as long as they display information. For example, electronicpaper can be used for posters, advertisement in vehicles such as trains,display in a variety of cards such as credit cards, and the like inaddition to e-book readers.

FIG. 23D illustrates a mobile phone including the semiconductor deviceaccording to the above embodiment. The mobile phone includes twohousings: a housing 340 and a housing 341. The housing 341 is providedwith a display panel 342, a speaker 343, a microphone 344, a pointingdevice 346, a camera lens 347, an external connection terminal 348, andthe like. The housing 340 is provided with a solar cell 349 for chargingthe mobile phone, an external memory slot 350, and the like. Inaddition, an antenna is incorporated in the housing 341. Thesemiconductor device according to one embodiment of the presentinvention is applied to a mobile phone, whereby the mobile phone canhold data even when power is not supplied. Moreover, degradation due towriting or erasing does not occur. Further, the mobile phone can operateat high speed. For these reasons, it is preferable to apply thesemiconductor device according to one embodiment of the presentinvention to a mobile phone.

The display panel 342 has a touch panel function. A plurality ofoperation keys 345 displayed as images are shown by dashed lines in FIG.23D. Note that the mobile phone includes a booster circuit for boostinga voltage output from the solar cell 349 to a voltage necessary for eachcircuit. Moreover, the mobile phone can include a contactless IC chip, asmall recording device, or the like in addition to the above structure.

The direction of display on the display panel 342 is changed asappropriate depending on applications. Further, the camera lens 347 isprovided on the same surface as the display panel 342, so that themobile phone can be used as a videophone. The speaker 343 and themicrophone 344 can be used for videophone calls, recording and playingsound, and the like as well as voice calls. Moreover, the housings 340and 341 in a state where they are developed as illustrated in FIG. 23Dcan be slid so that one is lapped over the other. Therefore, the size ofthe mobile phone can be reduced, which makes the mobile phone suitablefor being carried.

The external connection terminal 348 can be connected to a variety ofcables such as an AC adapter or a USB cable, so that the mobile phonecan be charged or can perform data communication. Moreover, the mobilephone can store and move a larger amount of data by inserting arecording medium into the external memory slot 350. Further, the mobilephone may have an infrared communication function, a televisionreception function, or the like in addition to the above functions.

FIG. 23E illustrates a digital camera including the semiconductor deviceaccording to the above embodiment. The digital camera includes a mainbody 361, a display portion (A) 367, an eyepiece portion 363, anoperation switch 364, a display portion (B) 365, a battery 366, and thelike. The semiconductor device according to one embodiment of thepresent invention is applied to a digital camera, whereby the digitalcamera can hold data even when power is not supplied. Moreover,degradation due to writing or erasing does not occur. Further, thedigital camera can operate at high speed. For these reasons, it ispreferable to apply the semiconductor device according to one embodimentof the present invention to a digital camera.

FIG. 23F illustrates a television set including the semiconductor deviceaccording to the above embodiment. In a television set 370, a displayportion 373 is incorporated in a housing 371. Images can be displayed onthe display portion 373. Here, the housing 371 is supported by a stand375.

The television set 370 can be operated by an operation switch of thehousing 371 or a separate remote controller 380. With operation keys 379of the remote controller 380, channels and volume can be controlled andimages displayed on the display portion 373 can be controlled. Moreover,the remote controller 380 may include a display portion 377 fordisplaying data output from the remote controller 380. The semiconductordevice according to one embodiment of the present invention is appliedto a television set, whereby the television set can hold data even whenpower is not supplied. Moreover, degradation due to writing or erasingdoes not occur. Furthermore, the television set can operate at highspeed. For these reasons, it is preferable to apply the semiconductordevice according to one embodiment of the present invention to atelevision set.

Note that the television set 370 is preferably provided with a receiver,a modem, and the like. A general television broadcast can be receivedwith the receiver. Moreover, when the television set is connected to acommunication network with or without wires via the modem, one-way (froma sender to a receiver) or two-way (between a sender and a receiver orbetween receivers) data communication can be performed.

The structures and methods described in this embodiment can be combinedas appropriate with any of the structures and methods described in theother embodiments.

This application is based on Japanese Patent Application serial No.2009-251261 filed with Japan Patent Office on Oct. 30, 2009, the entirecontents of which are hereby incorporated by reference.

The invention claimed is:
 1. A semiconductor device comprising: a firststorage element, wherein the first storage element includes: a firsttransistor, a second transistor, and a third transistor, wherein thefirst transistor is provided in a substrate including a semiconductormaterial, wherein the second transistor includes an oxide semiconductorlayer, wherein a concentration of hydrogen in the oxide semiconductorlayer is 5×10¹⁹/cm³ or less, wherein a gate electrode of the firsttransistor and one of the source electrode and the drain electrode ofthe second transistor are electrically connected to each other, andwherein one of the source electrode and the drain electrode of the firsttransistor and one of the source electrode and the drain electrode ofthe third transistor are electrically connected to each other.
 2. Thesemiconductor device according to claim 1, wherein the semiconductordevice further comprises a first wiring, a second wiring, a thirdwiring, a fourth wiring, a fifth wiring, and a second storage element,wherein the first storage element and the second storage element areconnected in parallel between the first wiring and the second wiring,wherein the first wiring and the other of the source electrode and thedrain electrode of the first transistor are electrically connected toeach other, wherein the second wiring and the other of the sourceelectrode and the drain electrode of the third transistor areelectrically connected to each other, wherein the third wiring and theother of the source electrode and the drain electrode of the secondtransistor are electrically connected to each other, wherein the fourthwiring and a gate electrode of the second transistor are electricallyconnected to each other, and wherein the fifth wiring and a gateelectrode of the third transistor are electrically connected to eachother.
 3. The semiconductor device according to claim 1, wherein thefirst transistor includes a channel region provided in the substrateincluding the semiconductor material, impurity regions provided so as tosandwich the channel region, and a first gate insulating layer over thechannel region, wherein the gate electrode of the first transistor isover the first gate insulating layer, and wherein the other of thesource electrode and the drain electrode of the first transistor and theone of the source electrode and the drain electrode of the firsttransistor are electrically connected to the impurity regions.
 4. Thesemiconductor device according to claim 1, wherein the second transistorincludes a gate electrode over the substrate including the semiconductormaterial, a second gate insulating layer over the gate electrode, andthe oxide semiconductor layer over the second gate insulating layer, andwherein the one of the source electrode and the drain electrode of thesecond transistor and the other of the source electrode and the drainelectrode of the second transistor are electrically connected to theoxide semiconductor layer.
 5. The semiconductor device according toclaim 1, wherein the third transistor includes a channel region providedin the substrate including the semiconductor material, impurity regionsprovided so as to sandwich the channel region, and a third gateinsulating layer over the channel region, wherein a gate electrode ofthe third transistor is over the third gate insulating layer, andwherein the one of the source electrode and the drain electrode of thethird transistor and the other of the source electrode and the drainelectrode of the third transistor are electrically connected to theimpurity regions.
 6. The semiconductor device according to claim 1,wherein the substrate including the semiconductor material is one of asingle crystal semiconductor substrate and an SOI substrate.
 7. Thesemiconductor device according to claim 1, wherein the semiconductormaterial is silicon.
 8. The semiconductor device according to claim 1,wherein the oxide semiconductor layer comprises an In—Ga—Zn—O-basedoxide semiconductor material.
 9. A semiconductor device comprising: afirst wiring, a second wiring, a third wiring, a fourth wiring and afifth wiring; and a plurality of storage elements, wherein one of theplurality of storage elements includes: a first transistor including: afirst gate electrode; one of a first source electrode and a first drainelectrode; and the other of the first source electrode and the firstdrain electrode; a second transistor including: a second gate electrode;one of a second source electrode and a second drain electrode; and theother of the second source electrode and the second drain electrode; anda third transistor including: a third gate electrode; one of a thirdsource electrode and a third drain electrode; and the other of the thirdsource electrode and the third drain electrode, wherein the firsttransistor is provided in a substrate including a semiconductormaterial, wherein the second transistor includes an oxide semiconductorlayer, wherein the plurality of storage elements is connected inparallel between the first wiring and the second wiring, wherein thefirst wiring and the one of the first source electrode and the firstdrain electrode are electrically connected to each other, wherein thesecond wiring and the other of the third source electrode and the thirddrain electrode are electrically connected to each other, wherein thefirst gate electrode and the one of the second source electrode and thesecond drain electrode are electrically connected to each other, andwherein the other of the first source electrode and the first drainelectrode and the one of the third source electrode and the third drainelectrode are electrically connected to each other.
 10. Thesemiconductor device according to claim 9, wherein the third wiring andthe other of the second source electrode and the second drain electrodeare electrically connected to each other, wherein the fourth wiring andthe second gate electrode are electrically connected to each other, andwherein the fifth wiring and the third gate electrode are electricallyconnected to each other.
 11. The semiconductor device according to claim9, wherein the first transistor includes a channel region provided inthe substrate including the semiconductor material, impurity regionsprovided so as to sandwich the channel region, a first gate insulatinglayer over the channel region, the first gate electrode over the firstgate insulating layer, and the one of the first source electrode and thefirst drain electrode and the other of the first source electrode andthe first drain electrode electrically connected to the impurityregions.
 12. The semiconductor device according to claim 9, wherein thesecond transistor includes the second gate electrode over the substrateincluding the semiconductor material, a second gate insulating layerover the second gate electrode, the oxide semiconductor layer over thesecond gate insulating layer, and the one of the second source electrodeand the second drain electrode and the other of the second sourceelectrode and the second drain electrode electrically connected to theoxide semiconductor layer.
 13. The semiconductor device according toclaim 9, wherein the third transistor includes a channel region providedin the substrate including the semiconductor material, impurity regionsprovided so as to sandwich the channel region, a third gate insulatinglayer over the channel region, the third gate electrode over the thirdgate insulating layer, and the one of the third source electrode and thethird drain electrode and the other of the third source electrode andthe third drain electrode electrically connected to the impurityregions.
 14. The semiconductor device according to claim 9, wherein thesubstrate including the semiconductor material is one of a singlecrystal semiconductor substrate and an SOI substrate.
 15. Thesemiconductor device according to claim 9, wherein the semiconductormaterial is silicon.
 16. The semiconductor device according to claim 9,wherein the oxide semiconductor layer comprises an In—Ga—Zn—O-basedoxide semiconductor material.
 17. The semiconductor device according toclaim 9, wherein concentration of hydrogen in the oxide semiconductorlayer is 5×10¹⁹/cm³ or less.
 18. The semiconductor device according toclaim 9, wherein an off-state current of the second transistor is1×10⁻¹³ A or less.
 19. A semiconductor device comprising: a firststorage element, wherein the first storage element includes: a firsttransistor, a second transistor, and a third transistor, wherein thefirst transistor is provided in a substrate including a semiconductormaterial, wherein the second transistor includes an oxide semiconductorlayer, wherein an off-state current of the second transistor is 1×10⁻¹³A or less, wherein a gate electrode of the first transistor and one ofthe source electrode and the drain electrode of the second transistorare electrically connected to each other, and wherein one of the sourceelectrode and the drain electrode of the first transistor and one of thesource electrode and the drain electrode of the third transistor areelectrically connected to each other.
 20. The semiconductor deviceaccording to claim 19, wherein the oxide semiconductor layer comprisesan In—Ga—Zn—O-based oxide semiconductor material.